정전 홀더, 대상물 테이블 및 리소그래피 장치
ENGELEN JOHANNES BERNARDUS CHARLES, TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, HUANG ZHUANGXIONG, NAKIBOGLU GUENES, TRALLI ALDO, BRULS RICHARD JOSEPH, VAN DER MEULEN FRITS, KRUIZINGA MATTHIAS, VAN GILS PETRUS JACOBUS MARIA, GUAN TIANNAN, DE VRIES SJOERD FRANS
Year of Publication 12.04.2024
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Year of Publication 12.04.2024
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VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
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ROLAND JACOBUS JOHANNES KERSTENS, ANGELO CESAR PETER DE KLERK, MICHEL LOOS, VAN DER MEULEN FRITS, FRANK JOHANNES CHRISTIAAN THEUERZEIT, PAUL JANSSEN, JEROEN DEKKERS, MAARTEN MATHIJS MARINUS JANSEN, GEERT MIDDEL, MAURICE LEONARDUS JOHANNES JANSSEN, KRUIZINGA MATTHIAS, MARTINUS JOZEF MARIA KESTERS, GERRIT VAN DEN BOSCH, JACOBUS MARIA DINGS, KRAMER RONALD HARM GUNTHER, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ERIK R LOOPSTRA, ANTONIUS LEENDERS MARTINUS HENDRIKUS, SILVESTER MATHEUS REIJNDERS, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, JORGE MANUEL AZEREDO LIMA, ANNE JOHANNES WILHELMUS VAN LIEVENOOGEN, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN
Year of Publication 02.04.2024
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Year of Publication 02.04.2024
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MOHAMMAD REZA KAMALI, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, RICHARD JOSEPH BRULS, VAN DER MEULEN FRITS, PAUL JANSSEN, SANDER VAN DEN HEIJKANT, JEROEN DEKKERS, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, MAARTEN MATHIJS MARINUS JANSEN, ERIK R LOOPSTRA, ERIK WILLEM BOGAART, ANTONIUS LEENDERS MARTINUS HENDRIKUS, VAN DER GRAAF SANDRA, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, KRUIZINGA MATTHIAS, JORGE MANUEL AZEREDO LIMA, GERRIT VAN DEN BOSCH, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN, JOSEPH H LYONS, ROUX STEPHEN
Year of Publication 06.10.2023
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Year of Publication 06.10.2023
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APPARATUS
VAN DER MEULEN FRITS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, LOOS MICHEL, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DEN BOSCH GERRIT, LOOPSTRA ERIK ROELOF, REIJNDERS SILVESTER MATHEUS, VAN LIEVENOOGEN ANNE JOHANNES WILHELMUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
Year of Publication 23.06.2023
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Year of Publication 23.06.2023
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냉각 후드 상에서의 빠른 온도 제어를 위한 가스 혼합
VALENTIN CHRISTIAAN LOUIS, VAN SANTVOORT JOHANNES FRANCISCUS MARTINUS, DONOSE RADU, HEMSCHOOTE DRIES VAAST PAUL, DE HOOGH JOOST, WIT ROBERT COENRAAD, VAN DER MEULEN FRITS, LEROUX ALAIN LOUIS CLAUDE, HUIJBERTS ALEXANDER MARINUS ARNOLDUS
Year of Publication 15.06.2021
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Year of Publication 15.06.2021
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VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 24.10.2022
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Year of Publication 24.10.2022
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스테이지 시스템, 리소그래피 장치 및 디바이스 제조 방법
RIEDSTRA BART FRISO, COX HENDRIKUS HERMAN MARIE, LIMPENS PATRICK WILLEM PAUL, VAN DER MEULEN FRITS, GIJZEN RONALD CORNELIS GERARDUS
Year of Publication 30.01.2019
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Year of Publication 30.01.2019
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APPARATUS
ROLAND JACOBUS JOHANNES KERSTENS, ANGELO CESAR PETER DE KLERK, MICHEL LOOS, VAN DER MEULEN FRITS, FRANK JOHANNES CHRISTIAAN THEUERZEIT, PAUL JANSSEN, JEROEN DEKKERS, MAARTEN MATHIJS MARINUS JANSEN, GEERT MIDDEL, MAURICE LEONARDUS JOHANNES JANSSEN, KRUIZINGA MATTHIAS, MARTINUS JOZEF MARIA KESTERS, GERRIT VAN DEN BOSCH, JACOBUS MARIA DINGS, KRAMER RONALD HARM GUNTHER, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ERIK R LOOPSTRA, ANTONIUS LEENDERS MARTINUS HENDRIKUS, SILVESTER MATHEUS REIJNDERS, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, JORGE MANUEL AZEREDO LIMA, ANNE JOHANNES WILHELMUS VAN LIEVENOOGEN, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
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MOHAMMAD REZA KAMALI, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, RICHARD JOSEPH BRULS, VAN DER MEULEN FRITS, PAUL JANSSEN, SANDER VAN DEN HEIJKANT, JEROEN DEKKERS, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, MAARTEN MATHIJS MARINUS JANSEN, ERIK R LOOPSTRA, ERIK WILLEM BOGAART, ANTONIUS LEENDERS MARTINUS HENDRIKUS, VAN DER GRAAF SANDRA, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, KRUIZINGA MATTHIAS, JORGE MANUEL AZEREDO LIMA, GERRIT VAN DEN BOSCH, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN, JOSEPH H LYONS, ROUX STEPHEN
Year of Publication 05.11.2020
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Year of Publication 05.11.2020
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리소그래피 장치
COX HENDRIKUS HERMAN MARIE, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, OVERKAMP JIM VINCENT, DEN BOEF ARIE JEFFREY, KOEVOETS ADRIANUS HENDRIK, DE WIT PAUL CORNE HENRI, VAN DER MEULEN FRITS
Year of Publication 25.04.2019
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Year of Publication 25.04.2019
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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APPARATUS
ROLAND JACOBUS JOHANNES KERSTENS, ANGELO CESAR PETER DE KLERK, MICHEL LOOS, VAN DER MEULEN FRITS, FRANK JOHANNES CHRISTIAAN THEUERZEIT, PAUL JANSSEN, JEROEN DEKKERS, MAARTEN MATHIJS MARINUS JANSEN, GEERT MIDDEL, MAURICE LEONARDUS JOHANNES JANSSEN, KRUIZINGA MATTHIAS, MARTINUS JOZEF MARIA KESTERS, GERRIT VAN DEN BOSCH, JACOBUS MARIA DINGS, KRAMER RONALD HARM GUNTHER, BEATRIJS LOUISE MARIE-JOSEPH KATRIEN VERBRUGGE, ERIK R LOOPSTRA, ANTONIUS LEENDERS MARTINUS HENDRIKUS, SILVESTER MATHEUS REIJNDERS, DERK SERVATIUS GERTRUDA BROUNS, ROBERT GABRIEL MARIA LANSBERGEN, JORGE MANUEL AZEREDO LIMA, ANNE JOHANNES WILHELMUS VAN LIEVENOOGEN, JEROME FRANCOIS SYLVAIN VIRGILE VAN LOO, MARC BRUIJN
Year of Publication 13.02.2020
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Year of Publication 13.02.2020
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APPARATUS
VAN DER MEULEN FRITS, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, BROUNS DERK SERVATIUS GERTRUDA, DINGS JACOBUS MARIA, AZEREDO LIMA JORGE MANUEL, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, KERSTENS ROLAND JACOBUS JOHANNES, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, LOOS MICHEL, KRAMER RONALD HARM GUNTHER, MIDDEL GEERT, THEUERZEIT FRANK JOHANNES CHRISTIAAN, DE KLERK ANGELO CESAR PETER, LEENDERS MARTINUS HENDRIKUS ANTONIUS, VAN DEN BOSCH GERRIT, LOOPSTRA ERIK ROELOF, REIJNDERS SILVESTER MATHEUS, VAN LIEVENOOGEN ANNE JOHANNES WILHELMUS, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, JANSSEN MAURICE LEONARDUS JOHANNES, DEKKERS JEROEN, KESTERS MARTINUS JOZEF MARIA
Year of Publication 06.12.2019
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Year of Publication 06.12.2019
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리소그래피 장치
LIMPENS PATRICK WILLEM PAUL, DE VRIES GOSSE CHARLES, KOEVOETS ADRIANUS HENDRIK, DE HOOGH JOOST, VAN DER MEULEN FRITS, DE WIT PAUL CORNE HENRI, HOOGENDAM CHRISTIAAN ALEXANDER, VAN DER MEULEN STAN HENRICUS, LEROUX ALAIN LOUIS CLAUDE, LAFARRE RAYMOND WILHELMUS LOUIS, VALENTIN CHRISTIAAN LOUIS, COX HENDRIKUS HERMAN MARIE, VAN DER SANDEN JACOBUS CORNELIS GERARDUS, OVERKAMP JIM VINCENT, HEMSCHOOTE DRIES VAAST PAUL, VAN DER SCHOOT HARMEN KLAAS, DERKS SANDER CATHARINA REINIER, GIJZEN RONALD CORNELIS GERARDUS, VLES DAVID FERDINAND, VAN BERKEL KOOS, CUIJPERS MARTINUS AGNES WILLEM, ARLEMARK ERIK JOHAN, WESTERHUIS EVERT AUKE RINZE
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
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LITHOGRAPHIC APPARATUS OBJECT POSITIONING SYSTEM AND DEVICE MANUFACTURING METHOD
BOERE STIJN WILLEM, HEMPENIUS PETER PAUL, DE VOS YOUSSEF KAREL MARIA, DE WIT PAUL CORNE HENRI, VAN DER MEULEN FRITS, KEMPER NICOLAAS RUDOLF, RIJS ROBERTUS MATHIJS GERARDUS
Year of Publication 24.01.2017
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Year of Publication 24.01.2017
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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VAN DEN HEIJKANT SANDER, KRAMER RONALD HARM GUNTHER, LIPSON MATTHEW, LYONS JOSEPH H, BOGAART ERIK WILLEM, VAN DER MEULEN FRITS, KAMALI MOHAMMAD REZA, VERBRUGGE BEATRIJS LOUISE MARIE JOSEPH KATRIEN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, BROUNS DERK SERVATIUS GERTRUDA, VAN DEN BOSCH GERRIT, AZEREDO LIMA JORGE MANUEL, LOOPSTRA ERIK ROELOF, VAN LOO JEROME FRANCOIS SYLVAIN VIRGILE, VAN DER GRAAF SANDRA, JANSEN MAARTEN MATHIJS MARINUS, JANSSEN PAUL, BRULS RICHARD JOSEPH, DEKKERS JEROEN, KRUIZINGA MATTHIAS, BRUIJN MARC, LANSBERGEN ROBERT GABRIEL MARIA, ROUX STEPHEN
Year of Publication 01.08.2017
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Year of Publication 01.08.2017
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
KATE NICOLAAS T, GRAAF ROELOF FREDERICK DE, SMEULERS JOHANNES PETRUS MARIA, VAN DER MEULEN FRITS, DONDERS SJOERD NICOLAAS L, HOOGENDAM CHRISTIAAN ALEXANDER, VERHAGEN MARTINUS CORNELIS MARIA, BELFROID STEFAN PHILIP CHRISTIAAN, VAN DER TOORN JAN-GERARD C, COX HENRIKUS HERMAN MARIE, KEMPER NICOLAAS R, HERMAN MARIA TEUNISSEN FRANCISCUS JOHANNES, VOGEL HERMAN, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 25.08.2016
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Year of Publication 25.08.2016
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