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Year of Publication 04.02.2020
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Year of Publication 26.03.2019
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METHODS FOR PROVIDING LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-ASSEMBLY OF BLOCK COPOLYMERS
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Year of Publication 21.02.2012
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Year of Publication 21.02.2012
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Year of Publication 30.12.2010
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Year of Publication 04.09.2014
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Lithographic Method
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Year of Publication 11.06.2009
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Year of Publication 11.06.2009
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Methods for providing lithography features on a substrate by self-assembly of block copolymers
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Year of Publication 21.03.2016
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Year of Publication 21.03.2016
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Methods for providing lithography features on a substrate by self-assembly of block copolymers
BOOTS, HENRI MARIE JOSEPH, FINDERS, JOZEF MARIA, PEETERS, EMIEL, VAN DER HEIJDEN, EDDY CORNELIS ANTONIUS, WUISTER, SANDER FREDERIK, DRUZHININA, TAMARA, VAN HEESCH, CHRISTIANUS MARTINUS
Year of Publication 16.03.2014
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Year of Publication 16.03.2014
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Method to provide a patterned orientation template for a self-assemblable polymer
PEETERS, EMIEL, VAN DER HEIJDEN, EDDY CORNELIS ANTONIUS, KETELAARS, WILHELMUS SEBASTIANUS MARCUS MARIA, DE RUITER, JESSICA, DRUZHININA, TAMARA, KOOLE, ROELOF, BOOTS, HENRI MARIE JOSEPH, MEESSEN, HIERONYMUS JOHANNUS CHRISTIAAN, BRIZARD, AURELIE MARIE ANDREE, FINDERS, JOZEF MARIA, NGUYEN, THANH TRUNG, WUISTER, SANDER FREDERIK, VAN HEESCH, CHRISTIANUS MARTINUS
Year of Publication 01.01.2015
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Year of Publication 01.01.2015
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