Lithographic apparatus and a device manufacturing method
Soethoudt, Abraham Alexander, Stevens, Lucas Henricus Johannes, Harberts, Dirk Willem, Fernandez Diaz, Laura Maria, Poiesz, Thomas, Welters, Wilhelmus Jacobus Johannes, Scholten, Bert Dirk, Pijnenburg, Johannes Adrianus Cornelis Maria, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 08.03.2022
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Year of Publication 08.03.2022
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LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Soethoudt, Abraham Alexander, Stevens, Lucas Henricus Johannes, Harberts, Dirk Willem, Fernandez Diaz, Laura Maria, Poiesz, Thomas, Welters, Wilhelmus Jacobus Johannes, Scholten, Bert Dirk, Pijnenburg, Johannes Adrianus Cornelis M, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 11.03.2021
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Year of Publication 11.03.2021
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Lithographic apparatus and a device manufacturing method
Soethoudt, Abraham Alexander, Stevens, Lucas Henricus Johannes, Harberts, Dirk Willem, Fernandez Diaz, Laura Maria, Poiesz, Thomas, Welters, Wilhelmus Jacobus Johannes, Scholten, Bert Dirk, Pijnenburg, Johannes Adrianus Cornelis Maria, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 22.12.2020
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Year of Publication 22.12.2020
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Inspection substrate and an inspection method
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Raaymakers, Jeroen Arnoldus Leonardus Johannes, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Saeed, Seerwan
Year of Publication 28.07.2020
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Year of Publication 28.07.2020
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Lithographic apparatus and a device manufacturing method
Van Boxtel, Frank Johannes Jacobus, Cox, Henrikus Herman Marie, Van Der Ham, Ronald, Polet, Theodorus Wilhelmus, Simons, Wilhelmus Franciscus Johannes, Corcoran, Gregory Martin Mason, Van De Winkel, Jimmy Matheus Wilhelmus
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
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Inspection Substrate and an Inspection Method
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Johannes Raaymakers, Jeroen Arnoldus Leonardus, Saeed, Seerwan
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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Inspection substrate and an inspection method
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Migchelbrink, Ferdy, Tanasa, Gheorghe, Keukens, Floor Lodewijk, Yu, Miao, Van Sommeren, Daan Daniel Johannes Antonius, Ras, Arnoldus Johannes Martinus Jozeph, Gattobigio, Giovanni Luca, Raaymakers, Jeroen Arnoldus Leonardus Johannes, Van De Winkel, Jimmy Matheus Wilhelmus, Arts, Petrus Martinus Gerardus Johannes, Buddenberg, Harold Sebastiaan, Saeed, Seerwan
Year of Publication 26.02.2019
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Year of Publication 26.02.2019
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Lithographic apparatus and a method of operating the apparatus
Van Lier, Henricus Martinus Dorotheus, Tanasa, Gheorghe, Jacobs, Johannes Henricus Wilhelmus, Leenders, Martinus Hendrikus Antonius, Da Paz Sena, Joao Paulo, Van Der Lee, Maurice Martinus Johannes, Watso, Robert Douglas, Van De Winkel, Jimmy Matheus Wilhelmus, Steijaert, Peter Paul, Van Dommelen, Youri Johannes Laurentius Maria, Mertens, Jeroen Johannes Sophia Maria, De Jong, Antonius Martinus Cornelis Petrus, Jansen, Hans
Year of Publication 08.01.2019
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Year of Publication 08.01.2019
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SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
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Year of Publication 12.04.2023
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Year of Publication 12.04.2023
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SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
SCHOLTEN, Bert Dirk, LIPSON, Matthew, SOHRABIBABAHEIDARY, Damoon, VAN DE WINKEL, Jimmy Matheus Wilhelmus, MASON, Christopher John
Year of Publication 05.03.2020
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Year of Publication 05.03.2020
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SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
STENEKEN, Ryan, CIFTCI SANDIKCI, Aysegul, OLEXOVITCH, Christopher M, DENG, Jerry, NEKLYUDOVA, Mariya, MAYER, Ryan, VAN DE WINKEL, Jimmy, PERRY, Michael, AKBAS, Mehmet, GUPTA, Sonia, DE GROOT, Antonius
Year of Publication 16.12.2021
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Year of Publication 16.12.2021
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SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
SCHOLTEN, Bert, MASON, Christopher, LIPSON, Matthew, SOHRABIBABAHEIDARY, Damoon, VAN DE WINKEL, Jimmy
Year of Publication 29.11.2018
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Year of Publication 29.11.2018
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TOOL FOR MODIFYING A SUPPORT SURFACE
SCHOLTEN, Bert Dirk, LINDEIJER, Tjarco, BILLEKENS, Peter Andreas Maria, VAN VERSEVELD, Hendrikus Theodorus Jacobus Franciscus, MEHAGNOUL, Harold Anton, VAN DE WINKEL, Jimmy Matheus Wilhelmus, VERMEULEN, Marcus Martinus Petrus Adrianus, GUAN, Tiannan, VAN NUENEN, Cas Johannes Petrus Maria
Year of Publication 26.08.2021
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Year of Publication 26.08.2021
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TOOL FOR MODIFYING A SUPPORT SURFACE
SCHOLTEN, Bert, VERMEULEN, Marcus, VAN VERSEVELD, Hendrikus, LINDEIJER, Tjarco, VAN NUENEN, Cas, MEHAGNOUL, Harold, VAN DE WINKEL, Jimmy, BILLEKENS, Peter, GUAN, Tiannan
Year of Publication 30.01.2020
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Year of Publication 30.01.2020
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LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
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Year of Publication 11.06.2020
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Year of Publication 11.06.2020
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SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
ANTONOV, Pavlo, BALTIS, Coen Hubertus Matheus, FARLE, Ann-Sophie m, SCHOLTEN, Bert Dirk, VAN DE VIJVER, Yuri Johannes Gabriel, ACHANTA, Satish, PALERMO, Ralph Nicholas, BOUWKNEGT, Jeroen, VAN DE WINKEL, Jimmy Matheus Wilhelmus, MASON, Christopher John, POIESZ, Thomas, AKCHURIN, Aydar
Year of Publication 25.02.2021
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Year of Publication 25.02.2021
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INSPECTION SUBSTRATE AND INSPECTION METHOD
EUMMELEN, Erik, Henricus, Egidius,Catharina, KEUKENS, , Floor, Lodewijk, YU, Miao, BUDDENBERG, Harold, Sebastiaan, MIGCHELBRINK, Ferdy, RAAYMAKERS, Jeroen, Arnoldus, Leonardus, Johannes, TANASA, Gheorghe, WOUTERS, Marijn, ARTS, Petrus, Martinus, Gerardus, Johannes, VAN SOMMEREN, Daan, Daniel, Johannes,Antonius, VAN DE WINKEL, Jimmy, Matheus,Wilhelmus, GATTOBIGIO, Giovanni, Luca, RAS, Arnoldus, Johannes, Martinus, Jozeph, SAEED, Seerwan
Year of Publication 02.09.2020
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Year of Publication 02.09.2020
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SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
ANTONOV, Pavlo, SCHOLTEN, Bert, FARLE, Ann-Sophie M, MASON, Christopher, ACHANTA, Satish, VAN DE VIJVER, Yuri, PALERMO, Ralph, VAN DE WINKEL, Jimmy, BOUWKNEGT, Jeroen, BALTIS, Coen, AKCHURIN, Aydar
Year of Publication 15.08.2019
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Year of Publication 15.08.2019
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Substrate holder for use in a lithographic apparatus and a method of manufacturing a substrate holder
NEKLYUDOVA, MARIYA, PERRY, MICHAEL, DE GROOT, ANTONIUS FRANCISCUS JOHANNES, STENEKEN, RYAN CHARLES, MAYER, RYAN, VAN DE WINKEL, JIMMY MATHEUS WILHELMUS, AKBAS, MEHMET ALI, CIFTCI SANDIKCI, AYSEGUL, GUPTA, SONIA, OLEXOVITCH, CHRISTOPHER M, DENG, JERRY JIANGUO
Year of Publication 01.12.2023
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Year of Publication 01.12.2023
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Substrate holder for use in lithographic apparatus and method of manufacturing substrate holder
ZIVCIS SANTICH, ANDRZEJ, MEIER RALPH, GUPTA SAURABH, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, PERRY MEREDITH, AKBAS MEHMET ALI, OLESOVICH COLIN MICHAEL, DUNN JOHN J, STANIKEN ROBERT C, NEKLIUDOVA, MARINA, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 03.02.2023
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Year of Publication 03.02.2023
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