Substrate holder, a lithographic apparatus and method of manufacturing devices
Tromp, Siegfried Alexander, Nakiboglu, Günes, Scholten, Bert Dirk, Van Sommeren, Daan Daniel Johannes Antonius, Frencken, Mark Johannes Hermanus, Baltis, Coen Hubertus Matheus, Van De Vijver, Yuri Johannes Gabriël
Year of Publication 14.02.2023
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Year of Publication 14.02.2023
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Lithographic apparatus, method for unloading a substrate and method for loading a substrate
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Year of Publication 30.05.2023
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Year of Publication 30.05.2023
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Substrate holder, a lithographic apparatus and method of manufacturing devices
Tromp, Siegfried Alexander, Nakiboglu, Günes, Scholten, Bert Dirk, Van Sommeren, Daan Daniel Johannes Antonius, Frencken, Mark Johannes Hermanus, Baltis, Coen Hubertus Matheus, Van De Vijver, Yuri Johannes Gabriël
Year of Publication 19.01.2021
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Year of Publication 19.01.2021
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Extraction body for lithographic apparatus
Laurent, Thibault Simon Mathieu, Ravensbergen, Simon Karel, Tromp, Siegfried Alexander, Roset, Niek Jacobus Johannes, Houben, Martijn, Waterson, Nicholas Peter, Kramer, Gijs, Vermeulen, Marcus Martinus Petrus Adrianus, Gerritzen, Justin Johannes Hermanus, Cloosterman, Vincentius Fransiscus, Van De Vijver, Yuri Johannes Gabriël, Baltis, Coen Hubertus Matheus
Year of Publication 12.07.2022
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Year of Publication 12.07.2022
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Extraction body for lithographic apparatus
Laurent, Thibault Simon Mathieu, Ravensbergen, Simon Karel, Tromp, Siegfried Alexander, Roset, Niek Jacobus Johannes, Houben, Martijn, Waterson, Nicholas Peter, Kramer, Gijs, Vermeulen, Marcus Martinus Petrus Adrianus, Gerritzen, Justin Johannes Hermanus, Cloosterman, Vincentius Fransiscus, Van De Vijver, Yuri Johannes Gabriël, Baltis, Coen Hubertus Matheus
Year of Publication 07.07.2020
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Year of Publication 07.07.2020
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Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
Nakiboglu, Günes, Buddenberg, Harold Sebastiaan, Melman, Johannes Cornelius Paulus, Vieyra Salas, Jorge Alberto, Zdravkov, Aleksandar Nikolov, Polet, Theodorus Wilhelmus, Stals, Walter Theodorus Matheus, Van Sommeren, Daan Daniel Johannes Antonius, Gattobigio, Giovanni Luca, Van Lieshout, Josephus Peter, Baltis, Coen Hubertus Matheus, Van De Vijver, Yuri Johannes Gabriël
Year of Publication 25.02.2020
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Year of Publication 25.02.2020
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Lithography apparatus, a method of manufacturing a device and a control program
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Kox, Ronald Frank, Blanco Carballo, Victor Manuel, Vieyra Salas, Jorge Alberto, Scholten, Bert Dirk, Custers, Rolf Hendrikus Jacobus, De Groot, Casper Roderik, Phillips, David Merritt, Van der Zanden, Frederik Antonius, Van de Vijver, Yuri Johannes Gabriël, Van den Nieuwelaar, Norbertus Josephus Martinus, Gunter, Pieter Lein Joseph
Year of Publication 14.01.2020
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Year of Publication 14.01.2020
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Substrate table, lithographic apparatus and method of operating a lithographic apparatus
Melman, Johannes Cornelis Paulus, Nakiboglu, Günes, Buddenberg, Harold Sebastiaan, Vieyra Salas, Jorge Alberto, Zdravkov, Aleksandar Nikolov, Polet, Theodorus Wilhelmus, Stals, Walter Theodorus Matheus, Van Sommeren, Daan Daniel Johannes Antonius, Gattobigio, Giovanni Luca, Van Lieshout, Josephus Peter, Baltis, Coen Hubertus Matheus, Van De Vijver, Yuri Johannes Gabriël
Year of Publication 11.06.2019
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Year of Publication 11.06.2019
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Lithography apparatus and method of manufacturing a device
Wouters, Marijn, Eummelen, Erik Henricus Egidius Catharina, Van Den Nieuwelaar, Norbertus Josephus Martinus, Kox, Ronald Frank, Blanco Carballo, Victor Manuel, Vieyra Salas, Jorge Alberto, Scholten, Bert Dirk, Custers, Rolf Hendrikus Jacobus, De Groot, Casper Roderik, Phillips, David Merritt, Van Der Zanden, Frederik Antonius, Van De Vijver, Yuri Johannes Gabriël, Gunter, Pieter Lein Joseph
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
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Sensor, lithographic apparatus and device manufacturing method
Laurent, Thibault Simon Mathieu, Teillet, Yohann Bruno Yvon, Kok, Haico Victor, Van De Rijdt, Johannes Hubertus Antonius, Kooiker, Allard Eelco, Jacobs, Johannes Henricus Wilhelmus, Knarren, Bastiaan Andreas Wilhelmus Hubertus, Van De Wal, Johannes Antonius Maria, Westerlaken, Jan Steven Christiaan, Hurkens-Mertens, Wilhelmina Margareta Jozef, Van De Vijver, Yuri Johannes Gabriël, Voogd, Robbert-Jan
Year of Publication 15.05.2018
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Year of Publication 15.05.2018
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Sensor, lithographic apparatus and device manufacturing method
Jacobs Johannes Henricus Wilhelmus, Kok Haico Victor, Westerlaken Jan Steven Christiaan, Van De Rijdt Johannes Hubertus Antonius, Kooiker Allard Eelco, Hurkens-Mertens Wilhelmina Margareta Jozef, Voogd Robbert Jan, Van De Vijver Yuri Johannes Gabriël, Van De Wal Johannes Antonius Maria, Knarren Bastiaan Andreas Wilhelmus Hubertus, Teillet Yohann Bruno Yvon, Laurent Thibault Simon Mathieu
Year of Publication 05.09.2017
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Year of Publication 05.09.2017
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LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD FOR LOADING A SUBSTRATE
SCHEIBERLICH, Arie Cornelis, BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, JEUNINK, Andre Bernardus, SCHREUDER, André, PACITTI, Evelyn Wallis, MARTENS, Robby Franciscus Josephus, DE VOS, Youssef Karel Maria, POIESZ, Thomas, VAN DORST, Ringo Petrus Cornelis, SENDEN, Dirk Jerome Andre, TEN BRINKE, Gerhard Albert, TROMP, Siegfried Alexander, GERRITZEN, Justin Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, KAMMINGA, Jelmer Mattheüs, SOETHOUDT, Abraham Alexander
Year of Publication 17.08.2023
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Year of Publication 17.08.2023
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Lithographic apparatus and device manufacturing method
Van De Vijver, Yuri Johannes Gabriël, Van Schoot, Jan Bernard Plechelmus, Swinkels, Gerardus Hubertus Petrus Maria, Schimmel, Hendrikus Gijsbertus, Labetski, Dzmitry, Van Empel, Tjarko Adriaan Rudolf
Year of Publication 14.02.2012
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Year of Publication 14.02.2012
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SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, TROMP, Siegfried Alexander, VAN SOMMERE, Daan Daniel Johannes Antonius, FRENCKEN, Mark Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, NAKIBOGLU, Günes
Year of Publication 13.05.2021
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Year of Publication 13.05.2021
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, VAN SOMMEREN, Daan Daniel Johannes Antonius, TROMP, Siegfried Alexander, FRENCKEN, Mark Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, NAKIBOGLU, Günes
Year of Publication 11.06.2020
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Year of Publication 11.06.2020
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, VAN SOMMEREN, Daan Daniel Johannes Antonius, TROMP, Siegfried Alexander, FRENCKEN, Mark Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, NAKIBOGLU, Günes
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
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EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
WATERSON, Nicholas Peter, RAVENSBERGEN, Simon Karel, CLOOSTERMAN, Vincentius Fransiscus, BALTIS, Coen Hubertus Matheus Matheus, HOUBEN, Martijn, KRAMER, Gijs, TROMP, Siegfried Alexander, GERRITZEN, Justin Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, ROSET, Niek Jacobus Johannes, VERMEULEN, Marcus Martinus Petrus Adrianus, LAURENT, Thibault Simon Mathieu
Year of Publication 10.09.2020
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Year of Publication 10.09.2020
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SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A LITHOGRAPHIC APPARATUS
ZDRAVKOV, Aleksandar Nikolov, BALTIS, Coen Hubertus Matheus, POLET, Theodorus Wilhelmus, VAN SOMMEREN, Daan Daniel Johannes Antonius, GATTOBIGIO, Giovanni Luca, VIEYRA SALAS, Jorge Alberto, MELMAN, Johannes Cornelis Paulus, VAN LIESHOUT, Josephus Peter, STALS, Walter Theodorus Matheus, VAN DE VIJVER, Yuri Johannes Gabriël, BUDDENBERG, Harold Sebastiaan, NAKIBOGLU, Günes
Year of Publication 01.01.2020
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Year of Publication 01.01.2020
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A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES
BALTIS, Coen Hubertus Matheus, SCHOLTEN, Bert Dirk, VAN SOMMEREN, Daan Daniel Johannes Antonius, TROMP, Siegfried Alexander, FRENCKEN, Mark Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, NAKIBOGLU, Günes
Year of Publication 24.10.2018
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Year of Publication 24.10.2018
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