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Year of Publication 13.09.2012
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Year of Publication 13.09.2012
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LEVASIER LEON MARTIN, RIJPMA ALBERT PIETER, SCHMITZ ROGER WILHELMUS ANTONIUS HENRICUS, JANSSEN FRANCISCUS JOHANNES JOSEPH, RANJAN MANISH, BAL KURSAT, LEROUX ALAIN LOUIS CLAUDE, VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS, TEN KATE NICOLAAS, MIRANDA MARCIO ALEXANDRE CANO, VOZNYI OLEG VIACHESLAVOVICH, GALAKTIONOV OLEKSIY, NIENHUYS HAN-KWANG, VAN SCHOOT JAN BERNARD PLECHELMUS, VAN DE VIJVER YURI JOHANNES GABRIEL, CUIJPERS MARTINUS AGNES WILLEM, PHILIPS DANNY MARIA HUBERTUS
Year of Publication 13.09.2012
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Year of Publication 13.09.2012
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Lithographic apparatus, method for unloading a substrate and method for loading a substrate
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Year of Publication 11.05.2018
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Year of Publication 11.05.2018
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Year of Publication 26.03.2009
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Year of Publication 26.03.2009
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Lithographic apparatus and device manufacturing method
LABETSKI DZMITRY, SCHIMMEL HENDRIKUS GIJSBERTUS, PETRUS MARIA SWINKELS GERARDUS HUBERTUS, GABRIEL VAN DE VIJVER YURI JOHANNES, PLECHELMUS VAN SCHOOT JAN BERNARD, RUDOLF VAN EMPEL TJARKO ADRIAAN
Year of Publication 19.03.2009
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Year of Publication 19.03.2009
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Lithographic apparatus, method for unloading a substrate and method for loading a substrate
DE VOS, YOUSSEF KAREL MARIA, BALTIS, COEN HUBERTUS MATHEUS, SCHOLTEN, BERT DIRK, TROMP, SIEGFRIED ALEXANDER, VAN DORST, RINGO PETRUS CORNELIS, MARTENS, ROBBY FRANCISCUS JOSEPHUS, POIESZ, THOMAS, SCHREUDER, ANDRE, JEUNINK, ANDRE BERNARDUS, GERRITZEN, JUSTIN JOHANNES HERMANUS, KAMMINGA, JELMER MATTHEUS, SOETHOUDT, ABRAHAM ALEXANDER, VAN DE VIJVER, YURI JOHANNES GABRIEL, SENDEN, DIRK JEROME ANDRE, PACITTI, EVELYN WALLIS, TEN BRINKE, GERHARD ALBERT, SCHEIBERLICH, ARIE CORNELIS
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
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Lithographic apparatus and method
LOOPSTRA ERIK ROELOF, VAN EMPEL TJARKO ADRIAAN RUDOLF, GELLRICH BERNHARD, VAN DER NET ANTONIUS JOHANNES, JANSEN BAUKE, VAN DE VIJVER YURI JOHANNES GABRIEL, SANDERSE RENS
Year of Publication 29.01.2009
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Year of Publication 29.01.2009
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METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRESSION SYSTEM AND A LITHOGRAPHIC APPARATUS
SWINKELS, GERARDUS HUBERTUS PETRUS MARIA, JONKERS, PETER GERARDUS, SCHIMMEL, HENDRIKUS GIJSBERTUS, HAAST, MARC ANTONIUS MARIA, VAN DE VIJVER, YURI JOHANNES GABRIEL, VAN EMPEL, TJARKO ADRIAAN RUDOLF, FRERIKS, JOHANNES MARIA, VERSTEEG, WENDELIN JOHANNA MARIA, LABETSKI, DZMITRY
Year of Publication 16.07.2009
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Year of Publication 16.07.2009
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METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRESSION SYSTEM AND A LITHOGRAPHIC APPARATUS
SWINKELS, GERARDUS HUBERTUS PETRUS MARIA, JONKERS, PETER GERARDUS, SCHIMMEL, HENDRIKUS GIJSBERTUS, HAAST, MARC ANTONIUS MARIA, VAN DE VIJVER, YURI JOHANNES GABRIEL, VAN EMPEL, TJARKO ADRIAAN RUDOLF, FRERIKS, JOHANNES MARIA, VERSTEEG, WENDELIN JOHANNA MARIA, LABETSKI, DZMITRY
Year of Publication 14.05.2009
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Year of Publication 14.05.2009
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MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
LOOPSTRA ERIK ROELOF, IVANOV VLADIMIR VITALEVICH, VAN EMPEL TJARKO ADRIAAN RUDOLF, BANINE VADIM YEVGENYEVICH, SWINKELS GERARDUS HUBERTUS PETRUS MARIA, MOORS JOHANNES HUBERTUS JOSEPHINA, LABETSKI DZMITRY, SCHIMMEL HENDRIKUS GIJSBERTUS, VAN SCHOOT JAN BERNARD PLECHELMUS, VAN DE VIJVER YURI JOHANNES GABRIEL
Year of Publication 09.04.2009
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Year of Publication 09.04.2009
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MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
SWINKELS, GERARDUS HUBERTUS PETRUS MARIA, VAN DE VIJVER, YURI JOHANNES GABRIEL, SCHIMMEL, HENDRIKUS GIJSBERTUS, VAN EMPEL, TJARKO ADRIAAN RUDOLF, LOOPSTRA, ERIK ROELOF, VAN SCHOOT, JAN BERNARD PLECHELMUS, IVANOV, VLADIMIR VITALEVICH, BANINE, VADIM YEVGENYEVICH, LABETSKI, DZMITRY, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 26.02.2009
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Year of Publication 26.02.2009
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
ROSET NIEK JACOBUS JOHANNES, VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS, LUTTIKHUIS BERNARDUS ANTONIUS JOHANNES, BOSSCHART CAREL HOPE, VAN DE VIJVER YURI JOHANNES GABRIEL, VAN DER HAM RONALD
Year of Publication 27.09.2007
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Year of Publication 27.09.2007
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
ROSET NIEK JACOBUS JOHANNES, VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS, BOSSCHAART KAREL JOOP, LUTTIKHUIS BERNARDUS ANTONIUS JOHANNES, VAN DE VIJVER YURI JOHANNES GABRIEL, VAN DER HAM RONALD
Year of Publication 06.09.2007
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Year of Publication 06.09.2007
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