Actuator device for use in a positioning system as well as such positioning system
Bloemhof, Jorrit Fedde, Van De Rijdt, Johannes Hubertus Antonius, Patti, Francesco, Verkooijen, Rob Antonius Andries, Van Ninhuijs, Bob, Van Mil, Roel Adrianus Jacobus
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Year of Publication 25.06.2024
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Substrate positioning device and electron beam inspection tool
Baggen, Marcel Koenraad Marie, Kremers, Maarten Frans Janus, Van Kempen, Robertus Jacobus Theodorus, Van De Rijdt, Johannes Hubertus Antonius, Hol, Sven Antoin Johan, Van De Groes, Henricus Martinus Johannes, Hempenius, Peter Paul, Bosch, Niels Johannes Maria, Kimman, Maarten Hartger
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Year of Publication 04.04.2023
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Patient support system and levelling system for such a patient support system
Van De Rijdt, Johannes Hubertus Antonius, Van Den Akker, Mark Antonius Adriana, Donker, Lucas Hendricus Johannes, Van Der Krieken, Peter, Kluijtmans, Ton Antonius Cornelis Henricus
Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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Electron beam inspection apparatus stage positioning
Baggen, Marcel Koenraad Marie, Arends, Antonius Henricus, Van Kempen, Robertus Jacobus Theodorus, Van De Rijdt, Johannes Hubertus Antonius, Tseng, Kuo-Feng, Kuindersma, Lucas, Van De Groes, Henricus Martinus Johannes, Ronde, Michael Johannes Christiaan, Hempenius, Peter Paul, Butler, Hans, Bosch, Niels Johannes Maria
Year of Publication 12.04.2022
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Year of Publication 12.04.2022
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Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus
Van De Rijdt, Johannes Hubertus Antonius, Van Dam, Marinus Johannes Maria, Van Berkel, Koos, Van Der Post, Sietse Thijmen, Van Boxmeer, Johan Maria
Year of Publication 26.11.2019
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Year of Publication 26.11.2019
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