A LITHOGRAPHIC APPARATUS
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Year of Publication 27.10.2022
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Fluid transfer system in a charged particle system
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Year of Publication 28.05.2024
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Apparatus and method for determining a condition associated with a pellicle
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Year of Publication 20.02.2024
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Lithographic apparatus and device manufacturing method
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Year of Publication 11.05.2021
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Patterning device
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Year of Publication 23.02.2021
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Method of manufacturing a membrane assembly
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Year of Publication 27.08.2024
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Year of Publication 27.08.2024
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Pellicle and pellicle assembly
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Year of Publication 20.08.2024
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Year of Publication 20.08.2024
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OXYGEN-LOSS RESISTANT TOP COATING FOR OPTICAL ELEMENTS
Van De Kerkhof, Marcus Adrianus, Zhu, Qiushi, Hoffmann, Kay, Brown, Daniel John William, Hummler, Klaus Martin, Mayer, Peter Matthew, Ma, Yue, LaForge, Andrew David, Fomenkov, Igor Vladimirovich
Year of Publication 18.08.2022
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Year of Publication 18.08.2022
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