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Year of Publication 13.07.2011
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Year of Publication 10.03.2020
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Year of Publication 30.05.2014
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Year of Publication 30.05.2014
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Year of Publication 03.01.2014
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Year of Publication 03.01.2014
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RADIATION SOURCE
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Year of Publication 22.09.2016
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Year of Publication 22.09.2016
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RADIATION SOURCE
JILISEN, REINIER, THEODORUS, MARTINUS, KLEEMANS, NIEK, ANTONIUS, JACOBUS, MARIA, VERBRAAK, HARALD, ERNEST, DE JONG, ARJEN, TEAKE, FEENSTRA, KORNELIS, FRITS, NIKIPELOV, ANDREY, SEROGLAZOV, PAVEL, VAN ASTEN, NICOLAAS, ANTONIUS, ALLEGONDUS, JOHANNES, BEIJSENS, ROLF, THEODORUS, NICOLAAS
Year of Publication 21.05.2015
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Year of Publication 21.05.2015
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Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
MODDERMAN THEODORUS MARINUS, VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, VAN BOXMEER JOHAN MARIA, NIJMEIJER GERRIT JOHANNES
Year of Publication 16.11.2010
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Year of Publication 16.11.2010
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Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
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Year of Publication 16.11.2010
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Year of Publication 16.11.2010
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SCATTEROMETER AND LITHOGRAPHIC APPARATUS
VAN ASTEN, NICOLAAS, VAN POMMEREN, PLACE, TIMMERMANS, JOHN, VAN BOXMEER, JOHAN, SINKE, ARNOLD, TAS, MARNIX
Year of Publication 14.05.2010
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Year of Publication 14.05.2010
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LITHOGRAPHIC APPARATUS AND MEASUREMENT METHOD
MODDERMAN THEODORUS MARINUS, VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, VAN BOXMEER JOHAN MARIA, NIJMEIJER GERRIT JOHANNES
Year of Publication 13.05.2010
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Year of Publication 13.05.2010
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LITHOGRAPHIC APPARATUS AND MEASUREMENT METHOD
MODDERMAN THEODORUS MARINUS, VAN ASTEN NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, VAN BOXMEER JOHAN MARIA, NIJMEIJER GERRIT JOHANNES
Year of Publication 13.05.2010
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Year of Publication 13.05.2010
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Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby
VAN ASTEN, NICOLAAS ANTONIUS ALLEGONDUS JOHANNES, MODDERMAN, THEODORUS MARINUS, VAN BOXMEER, JOHAN MARIA, NIJMEIJER, GERRIT JOHANNES
Year of Publication 01.08.2006
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Year of Publication 01.08.2006
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Scatterometer and lithographic apparatus
TIMMERMANS JOHN, SINKE ARNOLD, TAS MARNIX, VAN POMMEREN PLACE, VAN BOXMEER JOHAN, VAN ASTEN NICOLAAS
Year of Publication 04.12.2013
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Year of Publication 04.12.2013
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Method for correcting disturbances in a level sensor light path
Van Asten, Nicolaas Antonius Allegondus Johannes, Balan, Oana Cristina, Ouwehand, Luberthus, Viguurs, Machiel Jacobus Johannes, Van Well, Alexander Charles Franciscus Anna, Cheng, Lun Kai, Blokland, Huibert, Van Loenhout, Elke, Bakker, Hans Baltus
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
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