Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches
Guerre, Roland, Drechsler, Ute, Bhattacharyya, Debabrata, Rantakari, Pekka, Stutz, Richard, Wright, Robert V, Milosavljevic, Zlatoljub D, Vaha-Heikkila, Tauno, Kirby, Paul B, Despont, Michel
Published in Journal of microelectromechanical systems (01.06.2010)
Published in Journal of microelectromechanical systems (01.06.2010)
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Journal Article
60-GHz Millimeter-Wave Identification Reader on 90-nm CMOS and LTCC
Pursula, P, Karttaavi, T, Kantanen, M, Lamminen, A, Holmberg, J, Lahdes, M, Marttila, I, Lahti, M, Luukanen, A, Vähä-Heikkilä, T
Published in IEEE transactions on microwave theory and techniques (01.04.2011)
Published in IEEE transactions on microwave theory and techniques (01.04.2011)
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Journal Article
The development and evaluation of RF TSV for 3D IPD applications
Ebefors, Thorbjorn, Fredlund, Jessica, Perttu, Daniel, van Dijk, Raymond, Cifola, Lorenzo, Kaunisto, Mikko, Rantakari, Pekka, Vaha-Heikkila, Tauno
Published in 2013 IEEE International 3D Systems Integration Conference (3DIC) (01.10.2013)
Published in 2013 IEEE International 3D Systems Integration Conference (3DIC) (01.10.2013)
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Conference Proceeding
Low loss KU‐ to KA‐band analog DMTL phase shifter with 360° phase shift
Saijets, Jan, Rantakari, Pekka, Vähä‐Heikkilä, Tauno
Published in Microwave and optical technology letters (01.06.2017)
Published in Microwave and optical technology letters (01.06.2017)
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Journal Article
W-Band RF-Mems Dicke Switch Networks in a Gaas MMIC Process
Reyaz, Shakila Bint, Samuelsson, Carl, Malmqvist, Robert, Seok, Seonho, Fryziel, Michel, Rolland, Paul-Alain, Grandchamp, Brice, Rantakari, Pekka, Vähä-Heikkilä, and Tauno
Published in Microwave and optical technology letters (01.12.2013)
Published in Microwave and optical technology letters (01.12.2013)
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Journal Article
A W-band RF-MEMS switched LNA in a 70 nm mHEMT process
Reyaz, Shakila, Gustafsson, Andreas, Samuelsson, Carl, Malmqvist, Robert, Grandchamp, Brice, Rantakari, Pekka, Vähä-Heikkilä, Tauno
Published in International journal of RF and microwave computer-aided engineering (01.09.2015)
Published in International journal of RF and microwave computer-aided engineering (01.09.2015)
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Journal Article
Millimeter-Wave Identification-A New Short-Range Radio System for Low-Power High Data-Rate Applications
Pursula, P., Vaha-Heikkila, T., Muller, A., Neculoiu, D., Konstantinidis, G., Oja, A., Tuovinen, J.
Published in IEEE transactions on microwave theory and techniques (01.10.2008)
Published in IEEE transactions on microwave theory and techniques (01.10.2008)
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Journal Article
CMOS Compatible Switched MEMS Capacitors Up to 220 GHz Applications
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Conference Proceeding
A W-band RF-MEMS switched LNA in a 70 nm mHEMT process: A W-Band RF-MEMS Switched LNA
Reyaz, Shakila, Gustafsson, Andreas, Samuelsson, Carl, Malmqvist, Robert, Grandchamp, Brice, Rantakari, Pekka, Vähä-Heikkilä, Tauno
Published in International journal of RF and microwave computer-aided engineering (01.09.2015)
Published in International journal of RF and microwave computer-aided engineering (01.09.2015)
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Journal Article
Low-temperature CMOS-compatible 3D-integration of monocrystalline-silicon based PZT RF MEMS switch actuators on rf substrates
Saharil, Farizah, Wright, Robert V, Rantakari, Pekka, Kirby, Paul B, Vaha-Heikkila, Tauno, Niklaus, Frank, Stemme, Goran, Oberhammer, Joachim
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
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Conference Proceeding
60-GHz Millimeter-Wave Identification Reader on 90-nm CMOS and LTCC: SPECIAL ISSUE ON ULTRA-WIDEBAND (UWB) TECHNOLOGY
PURSULA, Pekka, KARTTAAVI, Timo, KANTANEN, Mikko, LAMMINEN, Antti, HOLMBERG, Jan, LAHDES, Manu, MARTTILA, Ilkka, LAHTI, Markku, LUUKANEN, Arttu, VÄHÄ-HEIKKILÄ, Tauno
Published in IEEE transactions on microwave theory and techniques (2011)
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Published in IEEE transactions on microwave theory and techniques (2011)
Journal Article
A wide-band on-wafer noise parameter measurement system at 50-75 GHz
Kantanen, M., Lahdes, M., Vaha-Heikkila, T., Tuovinen, J.
Published in IEEE transactions on microwave theory and techniques (01.05.2003)
Published in IEEE transactions on microwave theory and techniques (01.05.2003)
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Journal Article
G-Band Distributed Microelectromechanical Components Based on CMOS Compatible Fabrication
Vaha-Heikkila, T., Ylonen, M.
Published in IEEE transactions on microwave theory and techniques (01.03.2008)
Published in IEEE transactions on microwave theory and techniques (01.03.2008)
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Journal Article