Characterization of copper layers grown by electrochemical mechanical deposition technique
Wang, Tony, Lindquist, Paul, Erdemli, Serkan, Basol, Erol C., Zhang, Richard, Uzoh, Cyprian E., Basol, Bulent M.
Published in Thin solid films (01.05.2005)
Published in Thin solid films (01.05.2005)
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