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Excimer-laser-induced degradation of fused silica and calcium fluoride for 193-nm lithographic applications

Excimer-laser-induced degradation of fused silica and calcium fluoride for 193-nm lithographic applications

by Liberman, V, Rothschild, M, Sedlacek, J H, Uttaro, R S, Grenville, A, Bates, A K, Van Peski, C
Published in Optics letters (01.01.1999)

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Journal Article

Excimer-laser-induced densification of fused silica:laser-fluence and material-grade effects on the scaling law

Excimer-laser-induced densification of fused silica:laser-fluence and material-grade effects on the scaling law

by Liberman, V., Rothschild, M., Sedlacek, J.H.C., Uttaro, R.S., Grenville, A.
Published in Journal of non-crystalline solids (01.03.1999)

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Journal Article