A 28nm HKMG super low power embedded NVM technology based on ferroelectric FETs
Trentzsch, M., Flachowsky, S., Richter, R., Paul, J., Reimer, B., Utess, D., Jansen, S., Mulaosmanovic, H., Muller, S., Slesazeck, S., Ocker, J., Noack, M., Muller, J., Polakowski, P., Schreiter, J., Beyer, S., Mikolajick, T., Rice, B.
Published in 2016 IEEE International Electron Devices Meeting (IEDM) (01.12.2016)
Published in 2016 IEEE International Electron Devices Meeting (IEDM) (01.12.2016)
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Conference Proceeding
In-situ Low Energy Argon Ion Milling of Nanoelectronic Structures Using a Triple Beam System
Stegmann, H, Ritz, Y, Utess, D, Engelmann, H-J, Zschech, E
Published in Microscopy and microanalysis (01.07.2009)
Published in Microscopy and microanalysis (01.07.2009)
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Journal Article
Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
Triyoso, Dina H., Hempel, K., Ohsiek, S., Jaschke, V., Shu, J., Mutas, S., Dittmar, K., Schaeffer, J., Utess, D., Lenski, M.
Published in ECS journal of solid state science and technology (01.01.2013)
Published in ECS journal of solid state science and technology (01.01.2013)
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Journal Article
Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties
Wojcik, H., Junige, M., Bartha, W., Albert, M., Neumann, V., Merkel, U., Peeva, A., Gluch, J., Menzel, S., Munnik, F., Liske, R., Utess, D., Richter, I., Klein, C., Engelmann, H. J., Ho, P., Hossbach, C., Wenzel, C.
Published in Journal of the Electrochemical Society (01.01.2012)
Published in Journal of the Electrochemical Society (01.01.2012)
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Journal Article
Advantages of Faceted P-Raised Source/Drain in Fully Depleted Silicon on Insulator Technology
Aydin, Ömür Işıl, Holt, Judson Robert, Le Royer, Cyrille, Vanamurthy, Laks, Feudel, Thomas, Heyne, Tobias, Gerber, Ralf, Lenski, Markus, Jansen, Sören, Utess, Dirk, Klein, Christoph, Peeva, Anita, Mulfinger, George Robert, McArdle, Timothy J, Barge, David, Divay, Alexis, Lehmann, Steffen, Smith, Elliot, Peters, Carsten, Sachse, Jens-Uwe
Published in ECS transactions (20.07.2018)
Published in ECS transactions (20.07.2018)
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Journal Article
ALD Ta2O5 and Hf-doped Ta2O5 for BEOL compatible MIM
Triyoso, D. H., Weinreich, W., Seidell, K., Nolan, M. G., Polakowski, P., Utess, D., Ohsiek, S., Dittmar, K., Weisheit, M., Licbau, M., Fox, R.
Published in 2014 IEEE International Conference on IC Design & Technology (01.05.2014)
Published in 2014 IEEE International Conference on IC Design & Technology (01.05.2014)
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Conference Proceeding
S2-2 Back-Bias Reconfigurable Field Effect Transistor: A Flexible Add-On Functionality for 22 nm FDSOI
Sessi, V., Simon, M., Slesazeck, S., Drescher, M., Mulaosmanovic, H., Li, K., Binder, R., Waidmann, S., Zeun, A., Pawlik, A.-S., Utess, D., Gottleuber, V., Muller, S., Feldner, K., Heinzig, A., Dunkel, S., Kolodinski, S., Mikolajick, T., Trommer, J., Wiatr, M.
Published in 2021 Silicon Nanoelectronics Workshop (SNW) (13.06.2021)
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Published in 2021 Silicon Nanoelectronics Workshop (SNW) (13.06.2021)
Conference Proceeding
A 22nm FDSOI Technology with integrated 3.3V/5V/6.5V RFLDMOS Devices for IOT SOC applications
Schippel, C., Lehmann, S., Ong, S.N., Muehlhoff, A., Cortes, I., Chow, W.H., Utess, D., Zaka, A., Divay, A., Pakfar, A., Faul, J., Mazurier, J., Chew, K.W., Chan, L.H.K., Taylor, R., Rice, B., Harame, D.
Published in 2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2018)
Published in 2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (01.10.2018)
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Conference Proceeding
An innovative method for fast TEM sample transfer and immediate analysis thereafter
Utess, D., Wuerfel, A., Langer, E., Engelmann, H. J., Lehmann, R.
Published in 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2011)
Published in 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.07.2011)
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Conference Proceeding
VERFAHREN ZUR HERSTELLUNG VON LEITERZUGMUSTERN AUF EINER HALBLEITERANORDNUNG
WESCHENFELDER,DIETMAR,DE, APPELFELLER,KLAUS,DE, UTESS,SABINE,DE, LUNOW,ANDRE,DE
Year of Publication 14.02.1991
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Year of Publication 14.02.1991
Patent
WAERMEENTWICKELBARES DIAZOTYPIEMATERIAL
EPPERLEIN,JOACHIM,DD, MARKS,GUENTER,DD, MARX,JOERG,DD, UTESS,BENNO,DD
Year of Publication 16.05.1984
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Year of Publication 16.05.1984
Patent
VERFAHREN ZUR HERSTELLUNG FLACHER EMITTERGEBIETE
STARK,ANDREAS,DE, UTESS,SABINE,DE, OSCHMANN,BERND,DE, KAESTNER,RAINER,DE, ZIELKE,MICHAELA,DE
Year of Publication 13.06.1991
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Year of Publication 13.06.1991
Patent
VERFAHREN ZUR HERSTELLUNG FLACHER EMITTERGEBIETE
STARK,ANDREAS,DE, ASCHENBACH,KARSTEN,DD, UTESS,SABINE,DE, OSCHMANN,BERND,DE, KAESTNER,RAINER,DE, ZIELKE,MICHAELA,DE
Year of Publication 13.06.1991
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Year of Publication 13.06.1991
Patent
GAS ANALYSIS DEVICE WITH GALVANIC CELLS WITH SOLID ELECTROLYTE
UTESS,KLAUS-DIETER,DD, MOBIUS,HANS-HEINRICH,DD, GUTH,ULRICH,DD, JAKOBS,STEFFEN,DD, HARTUNG,REINHOLD,DD
Year of Publication 18.09.1986
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Year of Publication 18.09.1986
Patent
EINRICHTUNG ZUR GASANALYSE MIT GALVANISCHEN FESTELEKTROLYTZELLEN
UTESS,KLAUS-DIETER,DD, GUTH,ULRICH,DD, JAKOBS,STEFFEN,DD, MOEBIUS,HANS-HEINRICH,DD, HARTUNG,REINHOLD,DD
Year of Publication 17.10.1979
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Year of Publication 17.10.1979
Patent
VERFAHREN ZUR ERHOEHUNG DER DUENGEMITTELKORNFESTIGKEIT
KAUBISCH,ECKARD,DD, UTESS,KLAUS-DIETER,DD, SCHOLZ,PETER,DD, KAROS,BRUNO,DD, GROSSMANN,EVA,DD, STUEHMER,KARL-HEINZ,DD, STRUEWING,HEIDRUN,DD, VOGEL,GUENTHER,DD
Year of Publication 27.02.1985
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Year of Publication 27.02.1985
Patent