A new concept of self-aligned contact implantation for power devices
Poobalan, Banu, Kuan Yew Cheong, Ung Boon Hoe, Roland, Resch
Published in 2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT) (01.11.2008)
Published in 2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT) (01.11.2008)
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