Stripping of carbon coatings in radio-frequency inductively coupled plasma of H2/Ar
Sidelev, Dmitrii V., Ruchkin, Sergey E., Yurjev, Yuriy N., Lomygin, Anton, Syrtanov, Maxim S., Stolbovskaya, Galina N., Ukhanov, Sergey
Published in Surface & coatings technology (15.12.2021)
Published in Surface & coatings technology (15.12.2021)
Get full text
Journal Article