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Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films
Yasuoka, Shinnosuke, Shimizu, Takao, Tateyama, Akinori, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito, Hiranaga, Yoshiomi, Cho, Yasuo, Funakubo, Hiroshi
Published in Journal of applied physics (21.09.2020)
Published in Journal of applied physics (21.09.2020)
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Demonstration of ferroelectricity in ScGaN thin film using sputtering method
Uehara, Masato, Mizutani, Ryoichi, Yasuoka, Shinnosuke, Shiraishi, Takahisa, Shimizu, Takao, Yamada, Hiroshi, Akiyama, Morito, Funakubo, Hiroshi
Published in Applied physics letters (25.10.2021)
Published in Applied physics letters (25.10.2021)
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Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants
Anggraini, Sri Ayu, Uehara, Masato, Hirata, Kenji, Yamada, Hiroshi, Akiyama, Morito
Published in Scientific reports (09.03.2020)
Published in Scientific reports (09.03.2020)
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Larval study revealed diversity and life‐history traits of crypto‐benthic eel gobies
Maeda, Ken, Hanahara, Nozomi, Uehara, Masato, Tachihara, Katsunori
Published in Journal of fish biology (01.12.2022)
Published in Journal of fish biology (01.12.2022)
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Substrate temperature dependence of GaN film deposited on sapphire substrate by high-density convergent plasma sputtering device
Motomura, Taisei, Tabaru, Tatsuo, Uehara, Masato
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.09.2022)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.09.2022)
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Mg and Ti codoping effect on the piezoelectric response of aluminum nitride thin films
Anggraini, Sri Ayu, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito
Published in Scripta materialia (15.01.2019)
Published in Scripta materialia (15.01.2019)
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Effect of phase transition on the piezoelectric properties of scandium-alloyed gallium nitride
Hirata, Kenji, Ikemoto, Yu, Uehara, Masato, Yamada, Hiroshi, Anggraini, Sri Ayu, Akiyama, Morito
Published in Journal of applied physics (28.04.2024)
Published in Journal of applied physics (28.04.2024)
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Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb
Uehara, Masato, Shigemoto, Hokuto, Fujio, Yuki, Nagase, Toshimi, Aida, Yasuhiro, Umeda, Keiichi, Akiyama, Morito
Published in Applied physics letters (11.09.2017)
Published in Applied physics letters (11.09.2017)
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Preparation of YbAlN piezoelectric thin film by sputtering and influence of Yb concentration on properties and crystal structure
Uehara, Masato, Amano, Yuki, Anggraini, Sri Ayu, Hirata, Kenji, Yamada, Hiroshi, Akiyama, Morito
Published in Ceramics international (01.06.2021)
Published in Ceramics international (01.06.2021)
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Invariant polarization switching kinetics in an (Al0.8Sc0.2)N film with frequency and temperature
Yasuoka, Shinnosuke, Mizutani, Ryoichi, Ota, Reika, Shiraishi, Takahisa, Shimizu, Takao, Okamoto, Kazuki, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito, Funakubo, Hiroshi
Published in Applied physics letters (13.11.2023)
Published in Applied physics letters (13.11.2023)
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Significant Enhancement of Piezoelectric Response in AlN by Yb Addition
Hirata, Kenji, Mori, Yuto, Yamada, Hiroshi, Uehara, Masato, Anggraini, Sri Ayu, Akiyama, Morito
Published in Materials (09.01.2021)
Published in Materials (09.01.2021)
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Increase in the piezoelectric response of scandium-doped gallium nitride thin films sputtered using a metal interlayer for piezo MEMS
Uehara, Masato, Mizuno, Takaaki, Aida, Yasuhiro, Yamada, Hiroshi, Umeda, Keiichi, Akiyama, Morito
Published in Applied physics letters (07.01.2019)
Published in Applied physics letters (07.01.2019)
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Effect of Mg addition on the physical properties of aluminum nitride
Anggraini, Sri Ayu, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito
Published in Materials letters (15.05.2018)
Published in Materials letters (15.05.2018)
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Low-temperature AlN film deposition using magnetic mirror-type magnetron cathode for low gas pressure operation
Motomura, Taisei, Tabaru, Tatsuo, Uehara, Masato, Fujio, Yuki, Okuyama, Tetsuya
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.05.2020)
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.05.2020)
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