Process Development and Pilot-Scale Synthesis of Cefotetan
Fujimoto, Masaharu, Maeda, Tetsuya, Okumura, Keisuke, Uda, Mitsuru, Nakamura, Makoto, Kashiwagi, Teruya, Tsunoda, Takashi
Published in Organic process research & development (01.11.2004)
Published in Organic process research & development (01.11.2004)
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Journal Article
INSPECTION DEVICE AND INSPECTION METHOD FOR PATTERN PROFILE, EXPOSURE SYSTEM
UDA, MITSURU, YAMADA, YASUHARU, HAYANO, TERUHIKO, SUZUKI, AKIRA, TERAKAWA, KAZUNARI, MORITA, CHIAKI
Year of Publication 05.06.2003
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Year of Publication 05.06.2003
Patent
High-reliability tungsten-stacked via process with fully converted TiAl3 formation annealing
SHOHJI, R, UDA, M, NAKAMURA, T, YODA, T, ITOH, Y
Published in IEEE transactions on semiconductor manufacturing (01.08.1999)
Published in IEEE transactions on semiconductor manufacturing (01.08.1999)
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Conference Proceeding