SiO2 electret thin films prepared by various deposition methods
MINAMI, Tadatsugu, UTSUBO, Tetsuharu, YAMATANI, Tsuyoshi, MIYATA, Toshihiro, OHBAYASHI, Yoshiaki
Published in Thin solid films (24.02.2003)
Published in Thin solid films (24.02.2003)
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Journal Article
SiO 2 electret thin films prepared by various deposition methods
Minami, Tadatsugu, Utsubo, Tetsuharu, Yamatani, Tsuyoshi, Miyata, Toshihiro, Ohbayashi, Yoshiaki
Published in Thin solid films (2003)
Published in Thin solid films (2003)
Get full text
Journal Article