MULTI-COLUMN FIB FOR NANOFABRICATION APPLICATIONS
UTLAUT, MARK, W, GERLACH, ROBERT, L, SWANSON, LYNWOD, W, TESCH, PAUL, P
Year of Publication 16.08.2001
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Year of Publication 16.08.2001
Patent
System for attachment of an electrode into an inductively coupled plasma source
ZHANG SHOUYIN, SCHWIND GREGORY A, SMITH NOEL, SKOCZYLAS WALTER, KELLOGG SEAN, GRAUPERA ANTHONY, UTLAUT MARK W, PARKER N WILLIAM, WELLS ANDREW B
Year of Publication 05.06.2013
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Year of Publication 05.06.2013
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SHAPED AND LOW DENSITY FOCUSED ION BEAMS
UTLAUT, MARK, W, GERLACH, ROBERT, L, CHANDLER, CLIVE, D, YOUNG, RICHARD, J, TESCH, PAUL, P, VAN DER MAST, KARL, D
Year of Publication 17.10.2002
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Year of Publication 17.10.2002
Patent
SHAPED AND LOW DENSITY FOCUSED ION BEAMS
UTLAUT, MARK, W, GERLACH, ROBERT, L, CHANDLER, CLIVE, D, YOUNG, RICHARD, J, TESCH, PAUL, P, VAN DER MAST, KARL, D
Year of Publication 05.06.2002
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Year of Publication 05.06.2002
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DBR laser with nondynamic plasma grating formed by focused ion beam implanted dopants
Boenke, M.M., Wu, M.C., Wang, S., Clark, W.M., Stevens, E.H., Utlaut, M.W.
Published in IEEE journal of quantum electronics (01.06.1989)
Published in IEEE journal of quantum electronics (01.06.1989)
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Journal Article
Shaped and low density focused ion beams
GERLACH ROBERT L, TESCH PAUL P, CHANDLER CLIVE D, MAST KARL D. VAN DER, UTLAUT MARK W, YOUNG RICHARD J
Year of Publication 29.11.2001
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Year of Publication 29.11.2001
Patent
SHAPED AND LOW DENSITY FOCUSED ION BEAMS
UTLAUT, MARK, W, GERLACH, ROBERT, L, CHANDLER, CLIVE, D, YOUNG, RICHARD, J, TESCH, PAUL, P, VAN DER MAST, KARL, D
Year of Publication 26.07.2001
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Year of Publication 26.07.2001
Patent
Enhanced-wetting, boron-based liquid-metal ion source and method
SWANSON; LYNWOOD W, STORMS; EDMUND K, BOZACK; MICHAEL J, BELL; ANTHONY E, CLARK JR.; WILLIAM M, UTLAUT; MARK W
Year of Publication 16.02.1999
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Year of Publication 16.02.1999
Patent
GAP CONTROL SYSTEM FOR LOCALIZED VACUUM PROCESSING
LAIACANO, JOSEPH A, UTLAUT, MARK W, PETRIC, PAUL FRANCIS, FOLEY, MICHAEL S
Year of Publication 30.07.1986
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Year of Publication 30.07.1986
Patent
Gap control system for localized vacuum processing
LAIACANO, JOSEPH A, UTLAUT, MARK W, PETRIC, PAUL FRANCIS, FOLEY, MICHAEL S
Year of Publication 25.04.1984
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Year of Publication 25.04.1984
Patent
LIQUID METAL ION SOURCE AND ALLOY
UTLAUT, MARK, W, CLARK, WILLIAM, M. JR, SWANSON, LYNWOOD, W, SZKLARZ, EUGENE, G, BEHRENS, ROBERT, G, SANTANDREA, ROBERT, P, STORMS, EDMUND, K
Year of Publication 25.11.1992
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Year of Publication 25.11.1992
Patent
ENHANCED-WETTING, BORON-BASED LIQUID-METAL ION SOURCE AND METHOD
UTLAUT, MARK, W, SWANSON, LYNWOOD, W, CLARK, WILLIAM, M., JR, BELL, ANTHONY, E, BOZACK, MICHAEL, J, STORMS, EDMUND, K
Year of Publication 12.01.1989
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Year of Publication 12.01.1989
Patent
ENHANCED-WETTING, BORON-BASED LIQUID-METAL ION SOURCE AND METHOD
UTLAUT, MARK, W, SWANSON, LYNWOOD, W, CLARK, WILLIAM, M., JR, BELL, ANTHONY, E, BOZACK, MICHAEL, J, STORMS, EDMUND, K
Year of Publication 01.12.1988
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Year of Publication 01.12.1988
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