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COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

by USUJIMA AKIHIRO
Year of Publication 16.04.2015

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

by KOTANI YOSHIYUKI, USUJIMA AKIHIRO
Year of Publication 23.07.2015

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Patent

FIELD EFFECT TYPE COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

FIELD EFFECT TYPE COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

by WAKABAYASHI TOSHIHIRO, USUJIMA AKIHIRO
Year of Publication 16.04.2015

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

by USUJIMA AKIHIRO, SATO SHIGEO
Year of Publication 02.03.2015

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Patent

Pitch Dependence of Linewidth in the 0.25 µm Patterns Fabricated Using Positive Chemically Amplified Resist

Pitch Dependence of Linewidth in the 0.25 µm Patterns Fabricated Using Positive Chemically Amplified Resist

by Usujima, Akihiro, Wada, Hajime, Oikawa, Akira, Kaimoto, Yuko, Kenji Nakagawa, Kenji Nakagawa
Published in Japanese Journal of Applied Physics (01.12.1997)

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Journal Article

Effect of Substrate Treatments on Resist Footing in Chemically Amplified System

Effect of Substrate Treatments on Resist Footing in Chemically Amplified System

by Kaimoto, Yuko, Otoguro, Akihiko, Oikawa, Akira, Tago, Kazuki, Usujima, Akihiro, Hanyu, Isamu
Published in Journal of Photopolymer Science and Technology (1997)

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Journal Article

SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

by EMA, TAIJI, USUJIMA, AKIHIRO, ARIYOSHI, JUNICHI
Year of Publication 05.02.2009

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Patent

Direct Measurement of Offset Spacer Effect on Carrier Profiles in Sub-50 nm p-Metal Oxide Semiconductor Field-Effect Transistors

Direct Measurement of Offset Spacer Effect on Carrier Profiles in Sub-50 nm p-Metal Oxide Semiconductor Field-Effect Transistors

by Fukutome, Hidenobu, Saiki, Takashi, Nakamura, Ryou, Usujima, Akihiro, Aoyama, Takayuki
Published in Japanese Journal of Applied Physics (01.04.2006)

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Journal Article

Semiconductor device with pocket regions and method of manufacturing the same

Semiconductor device with pocket regions and method of manufacturing the same

by USUJIMA AKIHIRO
Year of Publication 28.04.2015

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Patent

SEMICONDUCTOR DEVICE WITH POCKET REGIONS AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE WITH POCKET REGIONS AND METHOD OF MANUFACTURING THE SAME

by USUJIMA AKIHIRO
Year of Publication 24.04.2014

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Patent

Semiconductor device with pocket regions and method of manufacturing the same

Semiconductor device with pocket regions and method of manufacturing the same

by USUJIMA AKIHIRO
Year of Publication 28.01.2014

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

by USUJIMA AKIHIRO
Year of Publication 14.07.2011

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

by USUJIMA AKIHIRO
Year of Publication 30.06.2011

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Patent

Semiconductor device and method of manufacturing same

Semiconductor device and method of manufacturing same

by SATOH SHIGEO, USUJIMA AKIHIRO
Year of Publication 21.04.2015

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Patent

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by USUJIMA AKIHIRO
Year of Publication 31.03.2011

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Patent

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

by USUJIMA AKIHIRO
Year of Publication 27.05.2010

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Patent

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

by SATOH SHIGEO, USUJIMA AKIHIRO
Year of Publication 08.10.2013

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Patent

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

by SATOH SHIGEO, USUJIMA AKIHIRO
Year of Publication 25.06.2013

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Patent

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

by SATOH SHIGEO, USUJIMA AKIHIRO
Year of Publication 13.06.2013

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Patent

COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

COMPOUND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME

by USUJIMA AKIHIRO, SATO SHIGEO
Year of Publication 13.06.2013

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Patent