SUBSTITUTE SAMPLE, TREATMENT CONTROL PARAMETER DETERMINATION METHOD, AND MEASUREMENT SYSTEM
NAKADA MOMOKA, USUI TAKETO, OMORI TAKESHI, KURIHARA MASARU, KOTO NAOYUKI
Year of Publication 31.08.2020
Get full text
Year of Publication 31.08.2020
Patent
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
FUKUCHI KOSUKE, USUI TAKETO, ASAKURA RYOJI, ETO SOICHIRO, NAKAMOTO SHIGERU, OKAMOTO TSUBASA
Year of Publication 11.04.2022
Get full text
Year of Publication 11.04.2022
Patent
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
FUKUCHI KOSUKE, USUI TAKETO, HIROTA KOSA, NAKAMOTO SHIGERU, INOUE TOMOMI
Year of Publication 19.09.2019
Get full text
Year of Publication 19.09.2019
Patent
PLASMA PROCESSING DEVICE AND METHOD FOR OPERATING PLASMA PROCESSING DEVICE
USUI TAKETO, KAWAGUCHI YOHEI, NAKAMOTO SHIGERU, INOUE TOMOMI, TOGAMI MASATO
Year of Publication 22.06.2017
Get full text
Year of Publication 22.06.2017
Patent
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
IZAWA MASARU, USUI TAKETO, MATSUI MIYAKO, OMORI TAKESHI, KUWABARA KENICHI, YASUI HISATERU
Year of Publication 04.10.2018
Get full text
Year of Publication 04.10.2018
Patent
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
FUKUCHI KOSUKE, USUI TAKETO, HIROTA KOSA, NAKAMOTO SHIGERU, INOUE TOMOMI
Year of Publication 20.10.2016
Get full text
Year of Publication 20.10.2016
Patent
PLASMA PROCESSING DEVICE
FUKUCHI KOSUKE, USUI TAKETO, HIROTA KOSA, NAKAMOTO SHIGERU, INOUE TOMOMI
Year of Publication 22.10.2015
Get full text
Year of Publication 22.10.2015
Patent
PLASMA PROCESSING APPARATUS
IZAWA MASARU, USUI TAKETO, SHINODA KAZUNORI, MIYOSHI SHINYA, YOKOGAWA KENETSU, TAKATSUMA YUTAKA, KOBAYASHI HIROYUKI, KOTO NAOYUKI, SAKAI SATORU, WATANABE TOMOYUKI
Year of Publication 10.05.2018
Get full text
Year of Publication 10.05.2018
Patent
PLASMA PROCESSING APPARATUS AND OPERATING METHOD FOR PLASMA PROCESSING APPARATUS
USUI TAKETO, HIROTA KOSA, NAKAMOTO SHIGERU, INOUE TOMOMI, TOGAMI MASATO
Year of Publication 02.02.2015
Get full text
Year of Publication 02.02.2015
Patent
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
FUKUCHI KOSUKE, USUI TAKETO, HIROTA KOSA, NAKAMOTO SHIGERU, INOUE TOMOMI
Year of Publication 02.02.2015
Get full text
Year of Publication 02.02.2015
Patent