Method of manufacturing an insulating film containing hafnium
GUO-LIN LIU, LIU ZIYUAN, IKEDA KAZUTO, OSHIMA MASAHARU, USUDA KOJI, TAKAHASHI HARUHIKO, YOSHIMARU MASAKI
Year of Publication 23.11.2010
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Year of Publication 23.11.2010
Patent
SEMICONDUCTOR DEVICE FOR EVALUATION AND ITS MANUFACTURING METHOD, AND EVALUATION METHOD THEREOF
KIMURA KENJIRO, YAMADA TAKAFUMI, MATSUSHIGE KAZUMI, USUDA KOJI, KOBAYASHI KEI
Year of Publication 14.09.2006
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Year of Publication 14.09.2006
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Ge Condensation Technologies for Advanced MOSFETs on SGOI and GOI Substrates
Sugiyama, Naoharu, Tezuka, Tsutomu, Irisawa, Toshifumi, Usuda, Koji, Moriyama, Yoshihiko, Nakaharai, Shu, Hirashita, Norio, Takagi, Shin-Ichi
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
Published in Meeting abstracts (Electrochemical Society) (30.06.2006)
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Journal Article
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
IKEDA KAZUTO, RIYUU KOKURIN, RYU SHIEN, OSHIMA MASAHARU, USUDA KOJI, TAKAHASHI HARUHIKO, YOSHIMARU MASAKI
Year of Publication 15.01.2009
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Year of Publication 15.01.2009
Patent
METHOD OF MANUFACTURING AN INSULATING FILM CONTAINING HAFNIUM
GUO-LIN LIU, LIU ZIYUAN, IKEDA KAZUTO, OSHIMA MASAHARU, USUDA KOJI, TAKAHASHI HARUHIKO, YOSHIMARU MASAKI
Year of Publication 01.01.2009
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Year of Publication 01.01.2009
Patent
SEMICONDUCTOR DEVICE
TEZUKA TSUTOMU, NUMATA TOSHINORI, USUDA KOJI, SUGIYAMA NAOHARU, TAKAGI SHINICHI
Year of Publication 05.08.2004
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Year of Publication 05.08.2004
Patent
Carrier-transport-enhanced CMOS using new channel materials and structures
Takagi, S., Irisawa, T., Tezuka, T., Nakaharai, S., Usuda, K., Hirashita, N., Takenaka, M., Sugiyama, N.
Published in 2007 International Semiconductor Device Research Symposium (01.12.2007)
Published in 2007 International Semiconductor Device Research Symposium (01.12.2007)
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Conference Proceeding