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"URUSHIHARA MIKA"
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"URUSHIHARA MIKA"
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SUBSTRATE TREATMENT DEVICE, GAS NOZZLE, SEMICONDUCTOR DEVICE PRODUCTION METHOD, SUBSTRATE TREATMENT METHOD, AND PROGRAM
by
URUSHIHARA Mika
,
OKAJIMA Yusaku
Year of Publication
21.09.2023
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SUBSTRATE PROCESSING DEVICE, GAS SUPPLYING STRUCTURE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND PROGRAM
by
URUSHIHARA Mika
,
HATTA Hiroki
,
OKAJIMA Yusaku
Year of Publication
18.07.2024
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SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING PROGRAM
by
HIRANO ATSUSHI
,
SASAKI TAKASHI
,
URUSHIHARA MIKA
Year of Publication
15.05.2024
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SUBSTRATE PROCESSING APPARATUS METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING PROGRAM
by
HIRANO ATSUSHI
,
SASAKI TAKAFUMI
,
URUSHIHARA MIKA
Year of Publication
09.05.2024
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기판 처리 장치, 반도체 장치의 제조 방법, 기판 처리 방법 및 프로그램
by
SASAKI TAKAFUMI
,
URUSHIHARA MIKA
,
HORII SADAYOSHI
Year of Publication
21.04.2023
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SUBSTRATE PROCESSING DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD, AND PROGRAM
by
SASAKI, Takafumi
,
HORII, Sadayoshi
,
URUSHIHARA
,
Mika
Year of Publication
31.03.2022
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기판 처리 장치, 프로그램 및 기판 처리 방법
by
SASAKI TAKAFUMI
,
URUSHIHARA MIKA
,
NAGATOMI YOSHIMASA
Year of Publication
04.02.2022
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SUBSTRATE TREATMENT DEVICE, METHOD OF PRODUCING SEMICONDUCTOR DEVICE, PROGRAM, AND GAS SUPPLY SYSTEM
by
NAGATOMI, Yoshimasa
,
URUSHIHARA
,
Mika
,
SASAKI, Takafumi
Year of Publication
04.02.2021
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SUBSTRATE PROCESSING DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND COMPUTER-READABLE RECORDING DEVICE
by
URUSHIHARA
,
MIKA
,
YAMAGUCHI, TAKATOMO
,
SASAKI, TAKAFUMI
Year of Publication
01.10.2015
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SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
by
SASAKI TAKAFUMI
,
URUSHIHARA MIKA
,
FUKUDA MASANAO
Year of Publication
02.04.2015
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND USE OF SUBSTRATE PROCESSING APPARATUS
by
URUSHIHARA
,
Mika
,
SASAKI, Takafumi
,
HIRANO, Atsushi
Year of Publication
08.05.2024
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
by
Urushihara
,
Mika
,
Hirano, Atsushi
,
Sasaki, Takafumi
Year of Publication
02.05.2024
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, AND RECORDING MEDIUM
by
Urushihara
,
Mika
,
SASAKI, Takafumi
,
Horii, Sadayoshi
Year of Publication
20.07.2023
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TWI827381B
by
URUSHIHARA
,
MIKA
,
OKAJIMA, YUSAKU
Year of Publication
21.12.2023
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SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF PROCESSING SUBSTRATE
by
NAGATOMI, Yoshimasa
,
URUSHIHARA
,
Mika
,
SASAKI, Takafumi
Year of Publication
21.04.2022
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Substrate treatment device, gas nozzle, semiconductor device production method, substrate treatment method, and program
by
URUSHIHARA
,
MIKA
,
OKAJIMA, YUSAKU
Year of Publication
01.10.2023
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Substrate processing apparatus, lid cover and method of manufacturing semiconductor device
by
Saido, Shuhei
,
Urushihara
,
Mika
,
Okajima, Yusaku
Year of Publication
25.02.2020
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Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
by
HIRANO ATSUSHI
,
SASAKI TAKAFUMI
,
URUSHIHARA MIKA
Year of Publication
30.04.2024
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD, AND PROGRAM
by
SASAKI TAKAFUMI
,
URUSHIHARA MIKA
,
HORII SADAYOSHI
Year of Publication
18.04.2023
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Cover of seal cap for reaction chamber of semiconductor
by
Okajima Yusaku
,
Urushihara Mika
,
Saido Shuhei
Year of Publication
20.03.2018
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