Ultra large pitch and depth structures metrology using spectral reflectometry in combination with RCWA based model and TLM Algorithm : AM: Advanced Metrology
Vito, Annalisa Del, Osherov, Ilya, Urbanowicz, Adam Michal, Katz, Yinon, Barkan, Kobi, Turovets, Igor, Haupt, Ronny
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)
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Conference Proceeding
Improved cleaning of plasma chamber walls by adding of noble gas cleaning step
DE GENDT, STEFAN, URBANOWICZ, ADAM MICHAL, BAKLANOV, MIKHAIL, SHAMIRYAN, DENIS
Year of Publication 12.02.2014
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Year of Publication 12.02.2014
Patent
Cleaning of plasma chamber walls using noble gas cleaning step
Urbanowicz, Adam Michal, Baklanov, Mikhaïl, Shamiryan, Denis, De Gendt, Stefan
Year of Publication 21.06.2011
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Year of Publication 21.06.2011
Patent
Improved cleaning of plasma chamber walls by adding of noble gas cleaning step
DE GENDT, STEFAN, URBANOWICZ, ADAM MICHAL, BAKLANOV, MIKHAIL, SHAMIRYAN, DENIS
Year of Publication 28.03.2012
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Year of Publication 28.03.2012
Patent
Cleaning of plasma chamber walls using noble gas cleaning step
SHAMIRYAN DENIS, URBANOWICZ ADAM MICHAL, BAKLANOV MIKHAIL, DE GENDT STEFAN
Year of Publication 21.06.2011
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Year of Publication 21.06.2011
Patent
FABRICATION OF POROGEN RESIDUES FREE AND MECHANICALLY ROBUST LOW-K MATERIALS
SHAMIRYAN DENIS, URBANOWICZ ADAM MICHAL, BAKLANOV MIKHAIL, VERDONCK PATRICK, VANSTREELS KRIS, DE GENDT STEFAN
Year of Publication 13.01.2011
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Year of Publication 13.01.2011
Patent
IMPROVED CLEANING OF PLASMA CHAMBER WALLS BY ADDING OF NOBLE GAS CLEANING STEP
SHAMIRYAN DENIS, URBANOWICZ ADAM MICHAL, BAKLANOV MIKHAIL, DE GENDT STEFAN
Year of Publication 26.03.2009
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Year of Publication 26.03.2009
Patent
CLEANING OF PLASMA CHAMBER WALLS USING NOBLE GAS CLEANING STEP
SHAMIRYAN DENIS, URBANOWICZ ADAM MICHAL, BAKLANOV MIKHAIL, DE GENDT STEFAN
Year of Publication 12.03.2009
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Year of Publication 12.03.2009
Patent
Improved cleaning of plasma chamber walls by adding of noble gas cleaning step
DE GENDT, STEFAN, URBANOWICZ, ADAM MICHAL, BAKLANOV, MIKHAIL, SHAMIRYAN, DENIS
Year of Publication 11.03.2009
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Year of Publication 11.03.2009
Patent