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APPARATUSES FOR ATOMIC LAYER DEPOSITION

APPARATUSES FOR ATOMIC LAYER DEPOSITION

by LAM HYMAN, ZHENG BO, HUA AI, YUAN XIAOXIONG, JACKSON MICHAEL, WANG HOU GONG, UMOTOY SALVADOR P, YU SAN HO
Year of Publication 30.08.2017

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Patent

APPARATUSES FOR ATOMIC LAYER DEPOSITION

APPARATUSES FOR ATOMIC LAYER DEPOSITION

by LAM HYMAN, ZHENG BO, HUA AI, YUAN XIAOXIONG, JACKSON MICHAEL, WANG HOU GONG, UMOTOY SALVADOR P, YU SAN HO
Year of Publication 19.09.2016

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Patent

APPARATUSES FOR ATOMIC LAYER DEPOSITION

APPARATUSES FOR ATOMIC LAYER DEPOSITION

by LAM HYMAN, ZHENG BO, HUA AI, YUAN XIAOXIONG, JACKSON MICHAEL, WANG HOU GONG, UMOTOY SALVADOR P, YU SAN HO
Year of Publication 05.10.2015

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Patent

APPARATUS AND METHOD OF MOUNTING AND SUPPORTING A SOLAR PANEL

APPARATUS AND METHOD OF MOUNTING AND SUPPORTING A SOLAR PANEL

by SULLIVAN JEFFREY S, WILLIAMS GARY, COSTUROS THEODOSSIOS V, BRENNAN MICHAEL, GOMEZ OSCAR, UMOTOY SALVADOR P, GAY CHARLES
Year of Publication 29.11.2010

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Patent

APPARATUSES FOR ATOMIC LAYER DEPOSITION

APPARATUSES FOR ATOMIC LAYER DEPOSITION

by LAM HYMAN, ZHENG BO, YUAN XIAO XIONG, HUA AI, JACKSON MICHAEL, WANG HOU GONG, UMOTOY SALVADOR P, YU SAN HO
Year of Publication 17.03.2011

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Patent

ONE-PIECE DUAL GAS FACEPLATE FOR SHOWERHEAD IN SEMICONDUCTOR WAFER PROCESSING SYSTEM

ONE-PIECE DUAL GAS FACEPLATE FOR SHOWERHEAD IN SEMICONDUCTOR WAFER PROCESSING SYSTEM

by CHIAO STEVE H, LEI LAWRENCE C, NGUYEN ANH N, UMOTOY SALVADOR P
Year of Publication 18.10.2001

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Patent

LID ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

LID ASSEMBLY FOR A SEMICONDUCTOR PROCESSING CHAMBER

by ZHENG BO, VO BEVAN, LITTAU KARL A, AO CHIEN-TEH, JIAN PING, UMOTOY SALVADOR P, LAI KEN KAUNG, TRINH SON N
Year of Publication 05.01.2002

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Patent

SHOWERHEAD WITH REDUCED CONTACT AREA

SHOWERHEAD WITH REDUCED CONTACT AREA

by ZHENG BO, VO BEVAN, KAO CHIEN-TEH, CHANG ANZHONG, LITTAU KARL A, LU SIQING, JIAN PING, UMOTOY SALVADOR P, LAI KEN KAUNG, TRINH SON N
Year of Publication 05.01.2002

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Patent

Lid assembly for a processing system to facilitate sequential deposition techniques

Lid assembly for a processing system to facilitate sequential deposition techniques

by Tzu, Gwo-Chuan, Umotoy, Salvador P
Year of Publication 07.05.2019

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Patent

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

by TZU Gwo-Chuan, UMOTOY Salvador P
Year of Publication 24.08.2017

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Patent

Lid assembly for a processing system to facilitate sequential deposition techniques

Lid assembly for a processing system to facilitate sequential deposition techniques

by Umotoy Salvador P, Tzu Gwo-Chuan
Year of Publication 07.03.2017

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Patent

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

by TZU GWOUAN, UMOTOY SALVADOR P
Year of Publication 10.07.2014

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Patent

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

by TZU GWOUAN, UMOTOY SALVADOR P
Year of Publication 19.05.2011

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Patent

Lid assembly for a processing system to facilitate sequential deposition techniques

Lid assembly for a processing system to facilitate sequential deposition techniques

by TZU GWOUAN, UMOTOY SALVADOR P
Year of Publication 15.03.2011

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Patent

Lid assembly for a processing system to facilitate sequential deposition techniques

Lid assembly for a processing system to facilitate sequential deposition techniques

by Tzu, Gwo-Chuan, Umotoy, Salvador P
Year of Publication 15.03.2011

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Patent

APPARATUSES FOR ATOMIC LAYER DEPOSITION

APPARATUSES FOR ATOMIC LAYER DEPOSITION

by UMOTOY, SALVADOR P, ZHENG, BO, JACKSON, MICHAEL, YUAN, XIAOXIONG, HUA, AI, LAM, HYMAN, WANG, HOU GONG, YU, SAN HO
Year of Publication 23.12.2015

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Patent

Lid assembly for a processing system to facilitate sequential deposition techniques

Lid assembly for a processing system to facilitate sequential deposition techniques

by TZU GWOUAN, UMOTOY SALVADOR P
Year of Publication 02.06.2005

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Patent

Lid assembly for a processing system to facilitate sequential deposition techniques

Lid assembly for a processing system to facilitate sequential deposition techniques

by TZU GWOUAN, UMOTOY SALVADOR P
Year of Publication 12.04.2005

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Patent

APPARATUSES FOR ATOMIC LAYER DEPOSITION

APPARATUSES FOR ATOMIC LAYER DEPOSITION

by UMOTOY, SALVADOR P, ZHENG, BO, JACKSON, MICHAEL, YUAN, XIAOXIONG, HUA, AI, LAM, HYMAN, WANG, HOU GONG, YU, SAN HO
Year of Publication 02.09.2015

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Patent

Lift pin actuating mechanism for semiconductor processing chamber

Lift pin actuating mechanism for semiconductor processing chamber

by Yudovsky, Joseph, Umotoy, Salvador P
Year of Publication 27.07.2004

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Patent

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