POLISHING DEVICE AND METHOD FOR POLISHING SUBSTRATE
UMESHITA, Naoki, TANABE, Shinichi, AKIMOTO, Toshikazu, OMIYA, Hiroyuki
Year of Publication 29.08.2024
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Year of Publication 29.08.2024
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
NAKANO TAKEO, UMESHITA NAOKI, ASAKO RYUICHI, IWASHITA MITSUAKI, UEDA HIROKAZU
Year of Publication 26.07.2023
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Year of Publication 26.07.2023
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액체 순환 시스템, 기판 처리 장치 및 액체 순환 방법
UMESHITA NAOKI, MORIMOTO TAMOTSU, AKIMOTO TOSHIKAZU, IWASHITA MITSUAKI, OKABE TAKAO, SEKIGUCHI KENJI, AKIYAMA KOJI, UEDA HIROKAZU
Year of Publication 26.06.2024
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Year of Publication 26.06.2024
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SUBSTRATE PROCESSING APPARATUS
UMESHITA, Naoki, MATSUZAKI, Kazuyoshi, UEDA, Hirokazu, AKIYAMA, Koji, AKIMOTO, Toshikazu, ASAKO, Ryuichi
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
Patent
SUBSTRATE PROCESSING METHOD AND IONIC LIQUID
NAKANO TAKEO, UMESHITA NAOKI, ASAKO RYUICHI, IWASHITA MITSUAKI, UKI KENICHI, UEDA HIROKAZU
Year of Publication 26.07.2023
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Year of Publication 26.07.2023
Patent
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
UMESHITA, Naoki, UEDA, Hirokazu, AKIMOTO, Toshikazu, HIRAYAMA, Masaki, KAWAKAMI, Satoru, MORI, Kiyoshi
Year of Publication 13.04.2023
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Year of Publication 13.04.2023
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반도체 장치 제조방법, 반도체 제조장치 및 시스템
UMESHITA NAOKI, HAYAKAWA TAKASHI, IWASHITA MITSUAKI, SEKIGUCHI KENJI, AKIYAMA KOJI, IIZUKA YOJI, UEDA HIROKAZU
Year of Publication 05.01.2023
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Year of Publication 05.01.2023
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VACUUM TREATMENT DEVICE AND OXIDIZING GAS REMOVING METHOD
ROTONDARO, Antonio, UMESHITA, Naoki, NAKANO, Takeo, UEDA, Hirokazu, IWASHITA, Mitsuaki, AKIYAMA, Koji, IIZUKA, Yoji, ASAKO, Ryuichi, SEKIGUCHI, Kenji, HAYAKAWA, Takashi, ARYAL, Dipak
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
UMESHITA, Naoki, NAKANO, Takeo, UEDA, Hirokazu, IWASHITA, Mitsuaki, ASAKO, Ryuichi
Year of Publication 20.07.2023
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Year of Publication 20.07.2023
Patent
Substrate processing method and ionic liquid
Ueda, Hirokazu, Asako, Ryuichi, Umeshita, Naoki, Iwashita, Mitsuaki, Uki, Kenichi, Nakano, Takeo
Year of Publication 18.06.2024
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Year of Publication 18.06.2024
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SUBSTRATE PROCESSING METHOD AND IONIC LIQUID
UMESHITA, Naoki, UKI, Kenichi, NAKANO, Takeo, UEDA, Hirokazu, IWASHITA, Mitsuaki, ASAKO, Ryuichi
Year of Publication 20.07.2023
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Year of Publication 20.07.2023
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VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
ROTONDARO, Antonio, UMESHITA, Naoki, NAKANO, Takeo, UEDA, Hirokazu, IWASHITA, Mitsuaki, AKIYAMA, Koji, IIZUKA, Yoji, ASAKO, Ryuichi, SEKIGUCHI, Kenji, HAYAKAWA, Takashi, ARYAL, Dipak
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
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VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
ROTONDARO, Antonio, UMESHITA, Naoki, NAKANO, Takeo, UEDA, Hirokazu, IWASHITA, Mitsuaki, AKIYAMA, Koji, IIZUKA, Yoji, ASAKO, Ryuichi, SEKIGUCHI, Kenji, HAYAKAWA, Takashi, ARYAL, Dipak
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
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Method for producing semiconductor device, semiconductor production device and system
AKIYAMA, KOJI, IWASHITA, MITSUAKI, IIZUKA, YOJI, UMESHITA, NAOKI, HAYAKAWA, TAKASHI, SEKIGUCHI, KENJI, UEDA, HIROKAZU
Year of Publication 01.03.2022
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Year of Publication 01.03.2022
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