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Year of Publication 24.03.2022
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Year of Publication 08.11.2022
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Year of Publication 26.01.2023
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Year of Publication 29.06.2023
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
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Year of Publication 29.06.2023
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Year of Publication 29.06.2023
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Year of Publication 22.06.2023
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Year of Publication 22.06.2023
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SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
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Year of Publication 11.05.2023
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Year of Publication 11.05.2023
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SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME
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Year of Publication 11.05.2023
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Year of Publication 11.05.2023
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APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING PLASMA
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Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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SUBSTRATE PROCESSING APPARATUS AND METHOD USING THE PLASMA
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Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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SUBSTRATE TREATMENT APPARATUS
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Year of Publication 06.05.2021
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Year of Publication 06.05.2021
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METHOD AND APPARATUS FOR ETCHING THIN LAYER
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Year of Publication 17.06.2021
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Year of Publication 17.06.2021
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APPARATUS AND METHOD FOR PROCESSING SUBSTRATE USING PLASMA
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Year of Publication 05.12.2023
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Year of Publication 05.12.2023
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SUBSTRATE PROCESSING APPARATUS AND METHOD USING THE PLASMA
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Year of Publication 11.12.2023
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Year of Publication 11.12.2023
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