APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR PROCESSING A SUBSTRATE
OH DONG SUB, UM YOUNG JE, HAN MIN SUNG, JU YOON JONG, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 05.07.2023
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Year of Publication 05.07.2023
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Apparatus and method for processing substrate using plasma
OH DONG SUB, UM YOUNG JE, KIM DONG HUN, HAN MIN SUNG, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 26.06.2023
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Year of Publication 26.06.2023
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AEROSOL DEPOSITION APPARATUS
TAKAHIRO TOKUMIYA, UM YOUNG JE, JANG JU YONG, KIM YONG WON, TAKAFUMI NOGUCHI
Year of Publication 31.08.2021
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Year of Publication 31.08.2021
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PLASMA ASHING APPARATUS
TAKAHIRO TOKUMIYA, UM YOUNG JE, HWANG DONG KI, NORIHISA OTANI, JEON YOUNG EUN
Year of Publication 31.08.2021
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Year of Publication 31.08.2021
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Substrate treating apparatus and semiconductor manufacturing equipment including the same
OH DONG SUB, UM YOUNG JE, KIM DONG HUN, HAN MIN SUNG, LEE JAE HOO, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 16.05.2023
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Year of Publication 16.05.2023
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
OH DONG SUB, KOO JUN TAEK, UM YOUNG JE, KIM DONG HUN, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 07.07.2022
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Year of Publication 07.07.2022
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SUBSTRATE TREATING APPARATUS AND METHOD OF OPERATING THE SAME
OH DONG SUB, KOO JUN TAEK, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, NOH MYOUNG SUB, LEE SEONG GIL
Year of Publication 07.07.2022
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Year of Publication 07.07.2022
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Apparatus and method for processing substrate using plasma
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 17.06.2022
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Year of Publication 17.06.2022
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Apparatus for treating substrate and method thereof
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 31.05.2022
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Year of Publication 31.05.2022
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An unit for controlling an electrode and an apparatus for treating a substrate with the unit
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 31.05.2022
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Year of Publication 31.05.2022
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Apparatus for treating substrate
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 17.05.2022
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Year of Publication 17.05.2022
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Apparatus for treating substrate and system for treating substrate with the apparatus
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 25.03.2022
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Year of Publication 25.03.2022
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Method for fabricating semiconductor device and apparatus for processing substrate using plasma
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 21.03.2022
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Year of Publication 21.03.2022
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Apparatus and method for processing substrate using plasma
KOO JUN TAEK, OH DONG SUB, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 15.03.2022
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Year of Publication 15.03.2022
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Substrate processing apparatus and method using the plasma
OH DONG SUB, KOO JUN TAEK, BAE DA SOM, UM YOUNG JE, LEE JI HWAN, KIM DONG HUN, KIM DU RI, NOH MYOUNG SUB, LEE SEONG GIL, PARK WAN JAE
Year of Publication 15.06.2022
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Year of Publication 15.06.2022
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Substrate treatment apparatus
SA YOON KI, KIM DO YEON, UM YOUNG JE, YEON YE RIM, KIM BYEONG GEUN, AHN DONG OK, HEO PIL KYUN, YOON HYUN, SEO YONG JUN, GOH JUNG SUK
Year of Publication 11.05.2021
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Year of Publication 11.05.2021
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Substrate treatment apparatus
SA YOON KI, KIM DO YEON, UM YOUNG JE, LEE CHOONG HYUN, YEON YE RIM, KIM BYEONG GEUN, HEO PIL KYUN, YOON HYUN, GOH JUNG SUK, SEO YONG JUN
Year of Publication 05.01.2021
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Year of Publication 05.01.2021
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THIN FILM ETCHING METHOD AND APPARATUS
JEONG JI HOON, SA YOON KI, LEE JEE YOUNG, YEON YE RIM, LIM DO YOUN, KIM KUK SAENG, KIM TAE SHIN, LEE JAE SEONG, HEO PIL KYUN, KIM DO YEON, KIM WON GEUN, UM YOUNG JE, KIM BYEONG GEUN, CHUNG YOUNG DAE, KIM KWANG SUP, YOON HYUN, GOH JUNG SUK, SEO YONG JUN
Year of Publication 23.06.2021
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Year of Publication 23.06.2021
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