Method for forming minute pattern and method for forming minute pattern mask
UM HYOUNG SICK, SUH KAHP YANG, YU SE-HWAN, CHAE JAE JUN, LEE SUNG HUN, LEE JI SEON, KHANG YOON HO
Year of Publication 13.05.2014
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Year of Publication 13.05.2014
Patent
Method for Forming Minute Pattern and Method for Forming Minute Pattern Mask
UM HYOUNG SICK, SUH KAHP YANG, YU SE-HWAN, CHAE JAE JUN, LEE SUNG HUN, LEE JI SEON, KHANG YOON HO
Year of Publication 25.04.2013
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Year of Publication 25.04.2013
Patent
METHOD OF FORMING FINE PATTERN MASK AND METHOD OF FORMING FINE PATTENR USING THE SAME
LEE, SUNG HUN, LEE, JI SEON, KHANG, YOON HO, UM, HYOUNG SICK, CHAE, JAE JUN, SUH, KAHP YANG, YU, SE HWAN
Year of Publication 02.05.2013
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Year of Publication 02.05.2013
Patent