Flow and reaction simulation of a tungsten CVD reactor
Ulacia F., J.I., Howell, S., Körner, H., Werner, Ch
Published in Applied surface science (01.09.1989)
Published in Applied surface science (01.09.1989)
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Journal Article
Equipment simulation of selective tungsten deposition
WERNER, C, ULACIA, J. I, HOPFMANN, C, FLYNN, P
Published in Journal of the Electrochemical Society (01.02.1992)
Published in Journal of the Electrochemical Society (01.02.1992)
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Journal Article
Crystal-orientation dependent etch rates and a trench model for dry etching
ULACIA F, J. I, PETTI, C. J, MCVITTIE, J. P
Published in Journal of the Electrochemical Society (01.06.1988)
Published in Journal of the Electrochemical Society (01.06.1988)
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Journal Article
Numerical Simulation of Gas Flow and Temperature in a Diffusion Furnace
Howell, S., Ulacia F., J.I., Werner, Ch
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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