Low-temperature CVD of silicon dioxide by alkoxyl-silane-isocyanate
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Conference Proceeding
Journal Article
Hydrogen-radical annealing of chemical vapor-deposited amorphous silicon films
UCHIDA, Y, KANOH, H, SUGIURA, O, MATSUMURA, M
Published in Japanese Journal of Applied Physics (01.12.1990)
Published in Japanese Journal of Applied Physics (01.12.1990)
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Journal Article
Theoretical Analysis of Amorphous-Silicon Field-Effect-Transistors
Kishida, Satoru, Naruke, Yasuo, Uchida, Yasutaka, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.01.1983)
Published in Japanese Journal of Applied Physics (01.01.1983)
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Journal Article
High-Mobility Amorphous-Silicon MUS Transistors
Okada, Hiroyuki, Uchida, Yasutaka, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.09.1986)
Published in Japanese Journal of Applied Physics (01.09.1986)
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Journal Article
Normal-pressure and low-temperature thermal oxidation of silicon
ZHANG, H, KANOH, H, SUGIURA, O, ODA, S, UCHIDA, Y, HATTORI, T, MATSUMURA, M
Published in Japanese Journal of Applied Physics (01.11.1987)
Published in Japanese Journal of Applied Physics (01.11.1987)
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Journal Article
Low-temperature thermal-oxidation of silicon
UCHIDA, Y, YUE, J.-H, KAMASE, F, SUZUKI, T, HATTORI, T, MATSUMURA, M
Published in Japanese Journal of Applied Physics (01.11.1986)
Published in Japanese Journal of Applied Physics (01.11.1986)
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Journal Article
Fully Self-Aligned Amorphous-Silicon MUS Transistors
Okada, Hiroyuki, Uchida, Yasutaka, Zhang, Hongyon, Sugiura, Osamu, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.09.1986)
Published in Japanese Journal of Applied Physics (01.09.1986)
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Journal Article
Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Uchida, Yasutaka, Ito, Yoshito, Ishida, Koichi
Published in Materials science & engineering. B, Solid-state materials for advanced technology (25.04.2005)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (25.04.2005)
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Journal Article
Arc-Discharge Produced Amorphous-Silicon Solar-cells
Uchida, Yasutaka, Kobayashi, Osamu, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.01.1982)
Published in Japanese Journal of Applied Physics (01.01.1982)
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Journal Article