Facility for simultaneous dual-beam ion implantation
Kaschny, J.R., Kögler, R., Tyrrof, H., Bürger, W., Eichhorn, F., Mücklich, A., Serre, C., Skorupa, W.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.10.2005)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (11.10.2005)
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