Atomistic simulation investigation of various plasma surface activations in SiCN dielectric bonding
Kim, Hojin, Tuchman, Andrew, Tsai, Yu-Hao, Hisamatsu, Toru, Son, Ilseok, Arkalgud, Sitaram
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
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Conference Proceeding
Selective Self-Assembled Monolayer for Copper Surface Protection During Plasma Activation of Hybrid-Bonded Wafers
Rogers, Jack, Netzband, Chris, Hoshino, Satohiko, Antonovich, Nathan, Kramer, Vanessa, Tuchman, Andrew
Published in 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) (01.05.2023)
Published in 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) (01.05.2023)
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Conference Proceeding
Annealing Effects in Sub-8 μm Pitch Die-to-Wafer Hybrid Bonding
Mukhopadhyay, Partha, Wenzel, Laura, Rudolph, Catharina, Tuchman, Andrew, Ryan, Kevin, Gildea, Adam, Nichols, Chris, Allgair, John, Arkalgud, Sitaram, deVilliers, Anton, Fulford, Jim
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
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Conference Proceeding
Quantifying the Electrical Impact of Bonding Misalignment for 0.5 μm Pitch Hybrid Bonding Structures
Ryan, Kevin, Ip, Nathan, Netzband, Christopher, Chien, Kun-Chieh, Tuchman, Andrew, Huang, Jason, LeFevre, Scott, Son, Ilseok, Aizawa, Hirokazu, Maekawa, Kaoru
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
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Conference Proceeding
(Invited) Physical Analysis and Modeling of Wafer-to-Wafer Copper Hybrid Bonding at Sub-Micron Pitches
Ryan, Kevin, Netzband, Christopher, Ip, Nathan, Hoshino, Satohiko, Kim, Hojin, Gildea, Adam, Tuchman, Andrew, LeFevre, Scott, Son, Ilseok, Aizawa, Hirokazu, Maekawa, Kaoru
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
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Journal Article
Biden Orders Federal Workers to Get Vaccinated or Face Strict COVID Testing and Masking Rules; January 6 Committee to Look at People who were Communicating with Trump on January 6; Dems Activists In Texas Conduct Selma-Inspired March From Georgetown To Austin; Actress And Activists Sharon Stone On COVID & Taking It Seriously. Aired 8-9p ET
Cooper, Anderson, Wen, Leana, Williams, Elliot, Andrew McCabe, Gary Tuchman
Published in Anderson Cooper 360 (29.07.2021)
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Published in Anderson Cooper 360 (29.07.2021)
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