Colloidosomes formed by nonpolar/polar/nonpolar nanoball amphiphiles
Chang, Hung-Yu, Tu, Sheng-Hung, Sheng, Yu-Jane, Tsao, Heng-Kwong
Published in The Journal of chemical physics (07.08.2014)
Published in The Journal of chemical physics (07.08.2014)
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Journal Article
Time-varying wetting behavior on copper wafer treated by wet-etching
Tu, Sheng-Hung, Wu, Chuan-Chang, Wu, Hsing-Chen, Cheng, Shao-Liang, Sheng, Yu-Jane, Tsao, Heng-Kwong
Published in Applied surface science (30.06.2015)
Published in Applied surface science (30.06.2015)
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Journal Article
Selective Etching of Silicon Oxide versus Nitride with Low Oxide Etching Rate
Yang, Min Chieh, Tu, Sheng Hung, Cooper, Emanuel, Wu, Hsing Chen
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
Titanium Nitride Hard Mask Removal with Selectivity to Tungsten in FEOL
Tu, Sheng Hung, Yang, Min Chieh, Cooper, Emanuel, Wu, Hsing Chen
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
High Throughput Wet Etch Solution for BEOL TiN Removal
Hsu, Chia Jung, Tu, Sheng Hung, Lippy, Steven, Cooper, Emanuel, Wang, Chieh Ju, Payne, Makonnen
Published in Solid state phenomena (01.09.2016)
Published in Solid state phenomena (01.09.2016)
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Journal Article
Impact of Q-Time on the Passivation of Al2O3/p-In0.53Ga0.47As Interfaces Using Various Surface Treatments
Luc, Quang-Ho, Chang, Edward Yi, Trinh, Hai-Dang, Wong, Yuen-Yee, Do, Huy-Binh, Lin, Yueh-Chin, Wang, Sheng-Ping, Yang, Min-Chieh, Wu, Hsing-Chen, Chen, Ke-Hung, Liao, Yi-Hsien, Tu, Sheng-Hung
Published in ECS solid state letters (01.01.2014)
Published in ECS solid state letters (01.01.2014)
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Journal Article
Selective Removal of Ashed Spin-On Glass
Wu, Hsing-Chen, Tu, Sheng-Hung
Published in Meeting abstracts (Electrochemical Society) (27.10.2013)
Published in Meeting abstracts (Electrochemical Society) (27.10.2013)
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Journal Article
Post-etch residue removal for advanced node beol processing
Payne, Makonnen, Tu, Sheng-Hung, Hsu, Chia-Jung, Cooper, Emanuel I, Wang, Chieh Ju, Hong, Eric, Kim, WonLae
Year of Publication 29.09.2020
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Year of Publication 29.09.2020
Patent
Compositions and methods for selectively etching titanium nitride
Tu, Sheng-Hung, Barnes, Jeffrey A, Chen, Li-Min, Cooper, Emanuel I, Lippy, Steven, Rajaram, Rekha
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
Patent
Compositions and methods for etching silicon nitride-containing substrates
Cooper, Emanuel, Dai, Wen-Haw, Tu, Sheng-Hung, Hong, SeongJin, Wu, Hsing-Chen, Bilodeau, Steven, Yang, Min-Chieh, Kim, Sean
Year of Publication 12.05.2020
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Year of Publication 12.05.2020
Patent
Compositions and methods for selectively etching titanium nitride
Tu, Sheng-Hung, Chen, Li-Min, Song, Lingyan, Hsu, Chia-Jung, Cooper, Emanuel I, Wang, Chieh Ju, Lippy, Steven
Year of Publication 12.11.2019
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Year of Publication 12.11.2019
Patent
Compositions and methods for selectively etching titanium nitride
Chen, Li-Min, Hsu, Chia-Jung, Cooper, Emanuel I, Wang, Chieh Ju, Lippy, Steven, Tu, Sheng-hung
Year of Publication 01.10.2019
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Year of Publication 01.10.2019
Patent
COMPOSITIONS AND METHODS FOR ETCHING SILICON NITRIDE-CONTAINING SUBSTRATES
Cooper, Emanuel, Dai, Wen-Haw, Tu, Sheng-Hung, Hong, SeongJin, Wu, Hsing-Chen, Bilodeau, Steven, Yang, Min-Chieh, Kim, Sean
Year of Publication 07.03.2019
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Year of Publication 07.03.2019
Patent
Compositions for cleaning III-V semiconductor materials and methods of using same
Chen Li-Min, Cooper Emanuel I, Wu Hsing-Chen, Yang Min-Chieh, Tu Sheng-Hung
Year of Publication 19.09.2017
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Year of Publication 19.09.2017
Patent
POST-ETCH RESIDUE REMOVAL FOR ADVANCED NODE BEOL PROCESSING
Payne, Makonnen, Tu, Sheng-Hung, Hsu, Chia-Jung, Cooper, Emanuel I, Wang, Chieh Ju, Hong, Eric, Kim, WonLae
Year of Publication 19.07.2018
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Year of Publication 19.07.2018
Patent
Compositions and methods for selectively etching titanium nitride
Chen Li-Min, Lippy Steven, Barnes Jeffrey A, Cooper Emanuel I, Rajaram Rekha, Tu Sheng-Hung
Year of Publication 17.01.2017
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Year of Publication 17.01.2017
Patent