Post ion implantation photoresist residue removal study
Jialei Liu, Huanxin Liu, Yonggen He, Haihui Liang, Huojin Tu
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
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Conference Proceeding
Investigation of seal nitride process in 32nm beyond HK/MG technology
Youfeng He, Haifeng Zhu, Lan Jin, Huojin Tu, Jinghua Ni, Yonggen He, Jingang Wu
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
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Conference Proceeding
Investigation of embedded silicon germanium typical defect solution for advanced CMOS process
Huojin Tu, Yonggen He, Youfeng He, Jialei Liu, Lan Jin, Guohui Cai, Yu Liu, Yujian Huang
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
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Conference Proceeding
Investigation of groove surface induced by strain relaxation in selective epitaxy SiGe process
Lan Jin, Huojin Tu, Youfeng He, Jing Lin, Yonggen He, Wei Lu, Jingang Wu
Published in 2012 12th International Workshop on Junction Technology (01.05.2012)
Published in 2012 12th International Workshop on Junction Technology (01.05.2012)
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Conference Proceeding
A Comprehensive Study of SiGe Source/ Drain Local Stress by Nano Beam Diffraction
Jin, Lan, Tu, Huojin, He, Youfeng, He, Yonggen, Wu, Jingang
Published in ECS transactions (01.01.2013)
Published in ECS transactions (01.01.2013)
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Journal Article
Investigation of SiGeB Epitaxy on Different Film Substrates
Jin, Lan, Tu, Huojin, He, Youfeng, Lin, Jing, Wu, Jiaqi, He, Yonggen, Wu, Jingang
Published in ECS transactions (27.02.2014)
Published in ECS transactions (27.02.2014)
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Journal Article
eSiGe Global and Micro Loading Effect Study in High Performance 45nm CMOS Technology
He, Yonggen, Tu, Huojin, Lin, Jing, Song, Hualong, Wang, Jun, Ma, Guiyin, Xu, Weizhong, Ye, Bin, Yu, Tzuchiang, Wu, Jingang
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
Silicon Phosphorus Process Uniformity Improvement Study in Advanced Node
Tu, Huojin, Wang, Hui, Peng, Li, Hong, Jiaqi, Nie, Wangxin, Tan, Jun, Sun, Qin, Cheng, Xinhua
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
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Conference Proceeding
Investigation of Intermittent Haze in 300mm SiGe Epitaxy Process and its Impact on PMOS Device Performance
He, Yonggen, He, Youfeng, Tu, Huojin, Jin, Lan, Lin, Jing, Xu, Weizhong, Yu, Tzu Chiang, Lu, Wei, Wu, Jinggang, Wang, Chenyu, Cong, Zhepeng, Tang, Ji Yue
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
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Journal Article
METHOD FOR FORMING RECESS AND FILLING EPITAXIAL LAYER IN SITU
Nie, Wangxin, Tu, Huojin, Liu, Jueyang, Zheng, Yincheng, Hu, Zhanyuan, WANG, Yaozeng
Year of Publication 31.03.2022
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Year of Publication 31.03.2022
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