Conversion efficiency of a laser-plasma source based on a Xe jet in the vicinity of a wavelength of 11 nm
Chkhalo, N. I., Garakhin, S. A., Lopatin, A. Ya, Nechay, A. N., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Tsybin, N. N., Zuev, S. Yu
Published in AIP advances (01.10.2018)
Published in AIP advances (01.10.2018)
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Journal Article
High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography
Malyshev, I V, Reunov, D G, Chkhalo, N I, Toropov, M N, Pestov, A E, Polkovnikov, V N, Tsybin, N N, Lopatin, A Ya, Chernyshev, A K, Mikhailenko, M S, Smertin, R M, Pleshkov, R S, Shirokova, O M
Published in Optics express (19.12.2022)
Published in Optics express (19.12.2022)
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Journal Article
Study of Emission Spectra of Cl-, Br-, and I-Containing Targets in the 3‒6.5 nm Spectral Range under Pulsed Laser Irradiation
Guseva, V. E., Garakhin, S. A., Nechai, A. N., Perekalov, A. A., Tsybin, N. N., Chkhalo, N. I.
Published in Bulletin of the Lebedev Physics Institute (01.12.2023)
Published in Bulletin of the Lebedev Physics Institute (01.12.2023)
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Journal Article
Thin film multilayer filters for solar EUV telescopes
Chkhalo, N I, Drozdov, M N, Kluenkov, E B, Kuzin, S V, Lopatin, A Ya, Luchin, V I, Salashchenko, N N, Tsybin, N N, Zuev, S Yu
Published in Applied optics. Optical technology and biomedical optics (10.06.2016)
Published in Applied optics. Optical technology and biomedical optics (10.06.2016)
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Journal Article
Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5-50 nm: description and testing results
Garakhin, S.A., Zabrodin, I.G., Zuev, S.E., Kas'kov, I.A., Lopatin, A.Ya, Nechay, A.N., Polkovnikov, V.N., Salashchenko, N.N., Tsybin, N.N., Chkhalo, N.I., Svechnikov, M.V.
Published in Quantum electronics (Woodbury, N.Y.) (01.05.2017)
Published in Quantum electronics (Woodbury, N.Y.) (01.05.2017)
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Journal Article
Solving the Stress Singularity Problem in Boundary-Value Problems of the Mechanics of Adhesive Joints and Layered Structures by Introducing a Contact Layer Model. Part 1. Resolving Equations for Multilayered Beams
Tsybin, N. Yu, Turusov, R. A., Sergeev, A. Yu, Andreev, V. I.
Published in Mechanics of composite materials (01.09.2023)
Published in Mechanics of composite materials (01.09.2023)
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Journal Article
A Composite of Layered Structure. Transversal Strength and Young’s Modulus
Turusov, R. A., Andreev, V. I., Tsybin, N. Yu
Published in Polymer science. Series D, Glues and sealing materials (01.03.2022)
Published in Polymer science. Series D, Glues and sealing materials (01.03.2022)
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Journal Article
Measurements of the Thermophysical Characteristics of Thin-Film Metal Filters for Extreme-Ultraviolet Radiation
Lopatin, A. Ya, Luchin, V. I., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.12.2023)
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Journal Article
Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets
Lopatin, A. Ya, Luchin, V. I., Nachay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Soloviev, A. A., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (01.05.2024)
Published in Technical physics (01.05.2024)
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Journal Article
Protective Free-Standing Films for Projection Lithography Installations in the Extreme UV Range
Zuev, S. Yu, Lopatin, A. Ya, Luchin, V. I., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
Published in Russian microelectronics (01.10.2023)
Published in Russian microelectronics (01.10.2023)
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Journal Article
Thin Film Al Targets for a Laser-Plasma Source of Extreme Ultraviolet Radiation
Garakhin, S. A., Lopatin, A. Ya, Nechay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (01.02.2024)
Published in Technical physics (01.02.2024)
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Journal Article
Search for High-Strength Multilayer Free-Standing Film Filters with High Transmittance in the Wavelength Range of the “Water Window” (2.3–4.4 nm)
Barysheva, M. M., Garakhin, S. A., Lopatin, A. Ya, Luchin, V. I., Malyshev, I. V., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (2024)
Published in Technical physics (2024)
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Journal Article
Comparative Study of the Thermal Stability of Be-Based Extreme Ultraviolet Pellicles
Zuev, S. Yu, Lopatin, A. Ya, Luchin, V. I., Salashchenko, N. N., Tatarskiy, D. A., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (01.12.2023)
Published in Technical physics (01.12.2023)
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Journal Article
Measurements of the Absolute Values of the Radiation Intensity in the Wavelength Range of 6.6–32 nm of Stainless Steel Targets with Pulsed Laser Excitation
Garakhin, S. A., Zabrodin, I. G., Zuev, S. Yu, Lopatin, A. Ya, Nechai, A. N., Pestov, A. E., Perekalov, A. A., Pleshkov, R. S., Polkovnikov, V. N., Salaschenko, N. N., Smertin, R. M., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (2024)
Published in Technical physics (2024)
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Journal Article
Investigation of the thermo stability of aluminum thin-film filters with protective MoSi 2 cap layers
Chkhalo, N I, Drozdov, M N, Gusev, S A, Lopatin, A Ya, Luchin, V I, Salashchenko, N N, Tatarskiy, D A, Tsybin, N N, Zuev, S Yu
Published in Applied optics. Optical technology and biomedical optics (01.01.2019)
Published in Applied optics. Optical technology and biomedical optics (01.01.2019)
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Journal Article
Imaging System of a Plasma Torch of a Betatron X-Ray Source
Antyushin, E. S., Akhsakhalyan, A. A., Zuev, S. Yu, Lopatin, A. Ya, Malyshev, I. V., Nechay, A. N., Perekalov, A. A., Pestov, A. E., Salashchenko, N. N., Toropov, M. N., Ulasevich, B. A., Tsybin, N. N., Chkhalo, N. I., Soloviev, A. A., Starodubtsev, M. V.
Published in Technical physics (2024)
Published in Technical physics (2024)
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Journal Article
Prospects for the Use of X-Ray Tubes with a Field-Emission Cathode and a Through-Type Anode in the Range of Soft X-Ray Radiation
Barysheva, M. M., Zuev, S. Yu, Lopatin, A. Ya, Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.
Published in Technical physics (01.11.2020)
Published in Technical physics (01.11.2020)
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Journal Article
Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope
Polkovnikov, V. N., Chkhalo, N. I., Meltchakov, E., Delmotte, F., Zuev, S. Yu, Salashchenko, N. N., Svechnikov, M. V., Tsybin, N. N.
Published in Technical physics letters (01.02.2019)
Published in Technical physics letters (01.02.2019)
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Journal Article
Calculation of two-layer cylinder with application of contact layer model
Tsybin, N Yu, Turusov, R A, Andreev, V I
Published in IOP conference series. Materials Science and Engineering (31.12.2018)
Published in IOP conference series. Materials Science and Engineering (31.12.2018)
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Journal Article