Structural changes in phosphorus-ion-implanted silicon
Kuznicki, Z. T., Tsyakh, R., Swiaek, Z., Raranskii, N. D., Fodchuk, I. M., Gorlei, P. N., Kadel’nik, D. V.
Published in Inorganic materials (01.05.2000)
Published in Inorganic materials (01.05.2000)
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