Relationship between water diffusivity of dielectric films and accelerated hot carrier degradation caused by water
FUKUDA, K, NAKANO, T, FUJISHIMA, M, MURA, N, TOKUNAGA, K, TSUZUMITANI, A, ICHINOSE, S
Published in Japanese Journal of Applied Physics (1995)
Published in Japanese Journal of Applied Physics (1995)
Get full text
Conference Proceeding
Journal Article