Proposal of hybrid deep learning systems for process and material design in thermal nanoimprint lithography
Tsukamoto, Sou, Tanabe, Hidekatsu, Yamamura, Ryuhei, Kameyama, Kai, Kawata, Hiroaki, Yasuda, Masaaki, Hirai, Yoshihiko
Published in Journal of Photopolymer Science and Technology (01.01.2021)
Published in Journal of Photopolymer Science and Technology (01.01.2021)
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Journal Article
Smart Systems for Material and Process Designing in Direct Nanoimprint Lithography Using Hybrid Deep Learning
Hirai, Yoshihiko, Tsukamoto, Sou, Tanabe, Hidekatsu, Kameyama, Kai, Kawata, Hiroaki, Yasuda, Masaaki
Published in Nanomaterials (Basel, Switzerland) (27.07.2022)
Published in Nanomaterials (Basel, Switzerland) (27.07.2022)
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Journal Article