Contact structure, contact pad layout and structure, mask combination and manufacturing method thereof
Tung, Yu-Cheng, Huang, Yung-Tai, Fang, Xiaopei, Jhan, Yi-Wang, Wu, Shaoyi, Tseng, Yi-Lei
Year of Publication 27.08.2024
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Year of Publication 27.08.2024
Patent
CONTACT STRUCTURE, CONTACT PAD LAYOUT AND STRUCTURE, MASK COMBINATION AND MANUFACTURING METHOD THEREOF
JHAN, Yi-Wang, TSENG, Yi-Lei, TUNG, Yu-Cheng, FANG, Xiaopei, HUANG, Yung-Tai, WU, Shaoyi
Year of Publication 02.09.2021
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Year of Publication 02.09.2021
Patent