Deposition of Al-doped and Al, Sc-co-doped zinc oxide films by RF- and DC-sputtering of the ZnO and Al–xSc (x=0, 0.4, 0.8 and 1.7 wt.%) targets
Lin, Jing-Chie, Peng, Kun-Cheng, Tseng, C.A., Lee, Sheng-Long
Published in Surface & coatings technology (30.08.2008)
Published in Surface & coatings technology (30.08.2008)
Get full text
Journal Article
Conference Proceeding
Characterization of the single and double films consisting of Al, Sc-co-doped ZnO/Al-doped ZnO and Al-doped ZnO/Al, Sc-co-doped ZnO
Peng, Kun-Cheng, Lin, Jing-Chie, Tseng, C.A., Lee, Sheng-Long
Published in Surface & coatings technology (30.08.2008)
Published in Surface & coatings technology (30.08.2008)
Get full text
Journal Article
Conference Proceeding