Etchless Fabrication of High‐Quality Refractory Titanium Nitride Nanostructures
Panos, Stavros, Tselekidou, Despina, Kassavetis, Spyros, Fekas, Ilias, Arvanitidis, John, Christofilos, Dimitris, Karfaridis, Dimitrios, Dellis, Spilios, Logothetidis, Stergios, Patsalas, Panos
Published in physica status solidi (b) (01.07.2021)
Published in physica status solidi (b) (01.07.2021)
Get full text
Journal Article
Etchless Fabrication of High‐Quality Refractory Titanium Nitride Nanostructures
Panos, Stavros, Tselekidou, Despina, Kassavetis, Spyros, Fekas, Ilias, Arvanitidis, John, Christofilos, Dimitris, Karfaridis, Dimitrios, Dellis, Spilios, Logothetidis, Stergios, Patsalas, Panos
Published in physica status solidi (b) (01.07.2021)
Published in physica status solidi (b) (01.07.2021)
Get full text
Journal Article