Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Matsunaga, Fumihiko, Tanaka, Masaaki, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Plasma processes and polymers (01.06.2016)
Published in Plasma processes and polymers (01.06.2016)
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Journal Article
Corrigendum on: Observation of Bi-Maxwellian Distributions in a H2 Plasma Produced by a Narrow Gap VHF Discharge
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Matsunaga, Fumihiko, Tanaka, Masaaki, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Plasma processes and polymers (01.06.2016)
Published in Plasma processes and polymers (01.06.2016)
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Journal Article
Mechanism of VHF H2 plasma production at high pressures
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (20.05.2016)
Published in Japanese Journal of Applied Physics (20.05.2016)
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Journal Article
Axial distribution of a VHF H2 plasma produced by a narrow gap discharge
Chen, Kuan-Chen, Chen, Chia-Fu, Lien, Cheng-Yang, Chiu, Kuo-Feng, Shi, Jen-Bin, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2016)
Published in Japanese Journal of Applied Physics (01.01.2016)
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Journal Article
Production of a uniform VHF H2 plasma by a narrow-gap discharge
Lien, Cheng-Yang, Chen, Chia-Fu, Yang, Ching-Lung, Kawai, Yoshinobu, Chiu, Kuo-Feng, Shi, Jen-Bin, Wang, Jui-Hao, Lien, Shui-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei
Published in Vacuum (01.11.2015)
Published in Vacuum (01.11.2015)
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Journal Article
Observation of Bi‐Maxwellian Distributions in a H 2 Plasma Produced by a Narrow Gap VHF Discharge
Chen, Kuan‐Chen, Chiu, Kuo‐Feng, Chen, Chia‐Fu, Lien, Cheng‐Yang, Tsai, Yu‐Jer, Lien, Ting‐Kuei, Matsunaga, Fumihiko, Tanaka, Masaaki, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Plasma processes and polymers (01.06.2016)
Published in Plasma processes and polymers (01.06.2016)
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Journal Article
Characteristics of a VHF H2 plasma at high pressures for different discharge gaps
Lien, Cheng-Yang, Chen, Chia-Fu, Yang, Ching-Lung, Kawai, Yoshinobu, Chiu, Kuo-Feng, Shi, Jen-Bin, Huang, Sy-Ruen, Wang, Jui-Hao, Tsai, Yu-Jer, Lien, Ting-Kuei
Published in Japanese Journal of Applied Physics (01.09.2015)
Published in Japanese Journal of Applied Physics (01.09.2015)
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Journal Article
Observation of Bi-Maxwellian Distributions in a H sub(2) Plasma Produced by a Narrow Gap VHF Discharge
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Matsunaga, Fumihiko, Tanaka, Masaaki, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Plasma processes and polymers (01.06.2016)
Published in Plasma processes and polymers (01.06.2016)
Get full text
Journal Article
Corrigendum on: Observation of Bi‐Maxwellian Distributions in a H 2 Plasma Produced by a Narrow Gap VHF Discharge
Chen, Kuan‐Chen, Chiu, Kuo‐Feng, Chen, Chia‐Fu, Lien, Cheng‐Yang, Tsai, Yu‐Jer, Lien, Ting‐Kuei, Matsunaga, Fumihiko, Tanaka, Masaaki, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Plasma processes and polymers (01.06.2016)
Published in Plasma processes and polymers (01.06.2016)
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Journal Article
Mechanism of VHF H 2 plasma production at high pressures
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.06.2016)
Published in Japanese Journal of Applied Physics (01.06.2016)
Get full text
Journal Article
Axial distribution of a VHF H 2 plasma produced by a narrow gap discharge
Chen, Kuan-Chen, Chen, Chia-Fu, Lien, Cheng-Yang, Chiu, Kuo-Feng, Shi, Jen-Bin, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2016)
Published in Japanese Journal of Applied Physics (01.01.2016)
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Journal Article
Mechanism of VHF H sub(2) plasma production at high pressures
Chen, Kuan-Chen, Chiu, Kuo-Feng, Chen, Chia-Fu, Lien, Cheng-Yang, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.06.2016)
Published in Japanese Journal of Applied Physics (01.06.2016)
Get full text
Journal Article
Axial distribution of a VHF H sub(2) plasma produced by a narrow gap discharge
Chen, Kuan-Chen, Chen, Chia-Fu, Lien, Cheng-Yang, Chiu, Kuo-Feng, Shi, Jen-Bin, Tsai, Yu-Jer, Lien, Ting-Kuei, Ogiwara, Kohei, Uchino, Kiichiro, Kawai, Yoshinobu
Published in Japanese Journal of Applied Physics (01.01.2016)
Published in Japanese Journal of Applied Physics (01.01.2016)
Get full text
Journal Article
Characteristics of a VHF H 2 plasma at high pressures for different discharge gaps
Lien, Cheng-Yang, Chen, Chia-Fu, Yang, Ching-Lung, Kawai, Yoshinobu, Chiu, Kuo-Feng, Shi, Jen-Bin, Huang, Sy-Ruen, Wang, Jui-Hao, Tsai, Yu-Jer, Lien, Ting-Kuei
Published in Japanese Journal of Applied Physics (01.09.2015)
Published in Japanese Journal of Applied Physics (01.09.2015)
Get full text
Journal Article