Search Results - "Troost, Kars Zeger" :: K.UTB vyhledávací portál

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고 개구수 스루-슬릿 소스 마스크 최적화 방법

by VAN SETTEN EELCO, TROOST KARS ZEGER, HSU DUAN FU STEPHEN
Year of Publication 18.05.2021

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METHOD OF OPERATING A PATTERNING DEVICE AND LITHOGRAPHIC APPARATUS

by VAN DER WIELEN ADRIANUS MARTINUS, TROOST KARS ZEGER, VENEMA WILLEM JURRIANUS, PROSYENTSOV VITALIY
Year of Publication 08.06.2012

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Method for high numerical aperture thru-slit source mask optimization

by Troost, Kars Zeger, Hsu, Duan-Fu Stephen, Van Setten, Eelco
Year of Publication 14.11.2023

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METHOD FOR HIGH NUMERICAL APERTURE THRU-SLIT SOURCE MASK OPTIMIZATION

by TROOST, Kars Zeger, SETTEN, Eelco VAN, HSU, Duan-Fu Stephen
Year of Publication 17.02.2022

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Lithographic apparatus and device manufacturing method using dose control

by BLEEKER ARNO JAN, TROOST KARS ZEGER
Year of Publication 03.11.2015

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Lithographic Apparatus and Device Manufacturing Method Using Dose Control

by BLEEKER ARNO JAN, TROOST KARS ZEGER
Year of Publication 26.06.2014

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Method of operating a patterning device and lithographic apparatus

by Venema, Willem Jurrianus, Van Der Wielen, Adrianus Martinus, Troost, Kars Zeger, Prosyentsov, Vitaliy
Year of Publication 01.05.2018

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Method for high numerical aperture thru-slit source mask optimization

by VAN SETTEN, EELCO, TROOST, KARS ZEGER, HSU, DUAN-FU STEPHEN
Year of Publication 01.03.2023

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METHOD OF OPERATING A PATTERNING DEVICE AND LITHOGRAPHIC APPARATUS

by VENEMA Willem Jurrianus, VAN DER WIELEN Adrianus Martinus, PROSYENTSOV Vitaliy, TROOST Kars Zeger
Year of Publication 04.05.2017

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Method of operating a patterning device and lithographic apparatus

by Van Der Wielen Adrianus Martinus, Troost Kars Zeger, Venema Willem Jurrianus, Prosyentsov Vitaliy
Year of Publication 14.02.2017

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Lithographic apparatus and device manufacturing method utilizing plural patterning devices

by TROOST KARS ZEGER
Year of Publication 24.04.2007

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Lithographic apparatus and device manufacturing method utilizing plural patterning devices

by Troost, Kars Zeger
Year of Publication 24.04.2007

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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

by BLEEKER ARNO JAN, TROOST KARS ZEGER
Year of Publication 17.05.2012

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Method of operating a patterning device and lithographic apparatus

by Troost Kars Zeger, Venema Willem Jurrianus, Prosyentsov Vitaliy, Van der Wielen Adrianus Martinus
Year of Publication 16.08.2016

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LITHOGRAPHY APPARATUS UTILIZING A PLURALITY OF PATTERN FORMING DEVICES AND DEVICE MANUFACTURING METHOD

by TROOST KARS ZEGER
Year of Publication 26.10.2006

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METHOD FOR HIGH NUMERICAL APERTURE THRU-SLIT SOURCE MASK OPTIMIZATION

by HSU DUAN-FU STEPHEN, VAN SETTEN EELCO, TROOST KARS ZEGER
Year of Publication 18.05.2021

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Lithographic apparatus and device manufacturing method

by BLEEKER ARNO JAN, TROOST KARS ZEGER
Year of Publication 21.06.2011

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Lithographic apparatus and device manufacturing method

by Bleeker, Arno Jan, Troost, Kars Zeger
Year of Publication 21.06.2011

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Lithographic apparatus and device manufacturing method

by BLEEKER, ARNO JAN, TROOST, KARS ZEGER
Year of Publication 21.12.2010

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Method for high numerical aperture thru-slit source mask optimization

by VAN SETTEN, EELCO, TROOST, KARS ZEGER, HSU, DUAN-FU STEPHEN
Year of Publication 01.08.2020

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