FLEXIBLE HYBRID DEFECT CLASSIFICATION FOR SEMICONDUCTOR MANUFACTURING
KOWALSKI MICHAL, GAO LISHENG, TRIBBLE ARIEL, MCCAULEY SHARON, ZHANG JIANXIN, KULKARNI ASHOK, HUET PATRICK, BHAGWAT SANDEEP, CAMPOCHIARO CECELIA ANNE, WU KENONG, KINI VIVEKANAND, SHANBHAG MARUTI, RANDALL DAVID, HUANG TONG
Year of Publication 17.09.2007
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Year of Publication 17.09.2007
Patent
Flexible hybrid defect classification for semiconductor manufacturing
Huet, Patrick, Shanbhag, Maruti, Bhagwat, Sandeep, Kowalski, Michal, Kini, Vivekanand, Randall, David, McCauley, Sharon, Huang, Tong, Zhang, Jianxin, Wu, Kenong, Gao, Lisheng, Tribble, Ariel, Kulkarni, Ashok, Campochiaro, Cecelia Anne
Year of Publication 28.11.2006
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Year of Publication 28.11.2006
Patent
Flexible hybrid defect classification for semiconductor manufacturing
KOWALSKI MICHAL, GAO LISHENG, TRIBBLE ARIEL, MCCAULEY SHARON, ZHANG JIANXIN, KULKARNI ASHOK, HUET PATRICK, BHAGWAT SANDEEP, CAMPOCHIARO CECELIA ANNE, WU KENONG, KINI VIVEKANAND, SHANBHAG MARUTI, RANDALL DAVID, HUANG TONG
Year of Publication 28.11.2006
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Year of Publication 28.11.2006
Patent
FLEXIBLE HYBRID DEFECT CLASSIFICATION FOR SEMICONDUCTOR MANUFACTURING
KOWALSKI MICHAL, GAO LISHENG, TRIBBLE ARIEL, MCCAULEY SHARON, ZHANG JIANXIN, KULKARNI ASHOK, HUET PATRICK, BHAGWAT SANDEEP, CAMPOCHIARO CECELIA ANNE, WU KENONG, KINI VIVEKANAND, SHANBHAG MARUTI, RANDALL DAVID, HUANG TONG
Year of Publication 23.11.2006
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Year of Publication 23.11.2006
Patent
FLEXIBLE HYBRID DEFECT CLASSIFICATION FOR SEMICONDUCTOR MANUFACTURING
KINI, VIVEKANAND, RANDALL, DAVID, ZHANG, JIANXIN, WU, KENONG, TRIBBLE, ARIEL, KULKARNI, ASHOK, BHAGWAT, SANDEEP, MCCAULEY, SHARON, SHANBHAG, MARUTI, HUET, PATRICK, KOWALSKI, MICHAL, GAO, LISHENG, CAMPOCHIARO, CECELIA, ANNE, HUANG, TONG
Year of Publication 13.04.2006
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Year of Publication 13.04.2006
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