Characterization of a Wireless Vacuum Sensor Prototype Based on the SAW-Pirani Principle
Toto, Sofia, Jouda, Mazin, Korvink, Jan G., Sundarayyan, Suparna, Voigt, Achim, Davoodi, Hossein, Brandner, Juergen J.
Published in Processes (01.12.2020)
Published in Processes (01.12.2020)
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