Impact of Air Filter Material on Metal Oxide Semiconductor (MOS) Device Characteristics in HF Vapor Environment
Hsiao, Chih-Wen, Lou, Jen-Chung, Yeh, Ching-Fa, Hsieh, Chih-Ming, Lin, Shiuan-Jeng, Kusumi, Toshio
Published in Japanese Journal of Applied Physics (15.05.2004)
Published in Japanese Journal of Applied Physics (15.05.2004)
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Journal Article
Impact of airborne molecular contamination to nano-device performance
Ching-Fa Yeh, Chih-Wen Hsiao, Shiuan-Jeng Lin, Zhi-Min Xie, Toshio Kusumi
Published in Proceedings of the 2nd IEEE Conference on Nanotechnology (2002)
Published in Proceedings of the 2nd IEEE Conference on Nanotechnology (2002)
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Conference Proceeding
Comparison of the distribution of phosphorus, nitrogen, potassium, calcium, magnesium, sodium and BHC in a low-land forest ecosystem in Taiwan and in Oita prefecture, Japan
Washizuka, Y. (Nippon Bunri Univ., Itigi, Oita (Japan). Faculty of Engineering), Kusumi, T, Himaki, S
Published in Japanese Journal of Applied Entomology and Zoology (1986)
Published in Japanese Journal of Applied Entomology and Zoology (1986)
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Journal Article
The removal of airborne molecular contamination in cleanroom using PTFE and chemical filters
Ching-Fa Yeh, Chih-Wen Hsiao, Shiuan-Jeng Lin, Chih-Min Hsieh, Kusumi, T., Aomi, H., Kaneko, H., Bau-Tong Dai, Ming-Shih Tsai
Published in IEEE transactions on semiconductor manufacturing (01.05.2004)
Published in IEEE transactions on semiconductor manufacturing (01.05.2004)
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Journal Article