Shape deviations of DLW microstructures in dependency of fabrication parameters
Fritzsche, Sven, Topolniak, Ievgenia, Weise, Matthias, Sturm, Heinz
Published in Journal of micromechanics and microengineering (01.12.2021)
Published in Journal of micromechanics and microengineering (01.12.2021)
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