Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry
Hilfiker, James N., Singh, Neha, Tiwald, Tom, Convey, Diana, Smith, Steven M., Baker, Jeffrey H., Tompkins, Harland G.
Published in Thin solid films (30.09.2008)
Published in Thin solid films (30.09.2008)
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Journal Article
Conference Proceeding
Use of Molecular Vibrations to Analyze Very Thin Films with Infrared Ellipsometry
Tompkins, Harland G, Tiwald, Tom, Bungay, Corey, Hooper, Andrew E
Published in The journal of physical chemistry. B (25.03.2004)
Published in The journal of physical chemistry. B (25.03.2004)
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Journal Article
Optimizing the ellipsometric analysis of a transparent layer on glass
Tompkins, Harland G., Smith, Steven, Convey, Diana
Published in Surface and interface analysis (01.12.2000)
Published in Surface and interface analysis (01.12.2000)
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Journal Article
Spectroscopic ellipsometry measurements of thin metal films
Tompkins, Harland G., Tasic, Sonja, Baker, Jeff, Convey, Diana
Published in Surface and interface analysis (01.03.2000)
Published in Surface and interface analysis (01.03.2000)
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Journal Article
Conference Proceeding
Determining the amount of Si-Si bonding in CVD oxynitrides
Tompkins, Harland G., Smith, Steven, Convey, Diana, Gregory, R. B., Kottke, M. L., Collins, David
Published in Surface and interface analysis (01.02.2003)
Published in Surface and interface analysis (01.02.2003)
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Journal Article
Conference Proceeding
5th International Conference on Spectroscopic Ellipsometry (ICSE-V)
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Conference Proceeding
Film thickness measurements using ellipsometry when the lower interface is uncharacterized
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Journal Article
Conference Proceeding
Effect of process parameters on the optical constants of thin metal films
Tompkins, Harland G., Baker, Jeffrey H., Convey, Diana
Published in Surface and interface analysis (01.03.2000)
Published in Surface and interface analysis (01.03.2000)
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Journal Article
Conference Proceeding
Controlled crystallization of LPCVD amorphous silicon
Tompkins, Harland G., Seddon, Ken, Garling, Lisa K., Fejes, Peter
Published in Thin solid films (1996)
Published in Thin solid films (1996)
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Journal Article