High growth temperature for AlN by jet stream gas flow metalorganic vapor phase epitaxy
Nagamatsu, Kentaro, Miyagawa, Takumi, Tomita, Atsushi, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki
Published in Scientific reports (10.02.2023)
Published in Scientific reports (10.02.2023)
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Journal Article
Investigation of V/III ratio dependencies for optimizing AlN growth during reduced parasitic reaction in metalorganic vapor phase epitaxy
Tomita, Atsushi, Miyagawa, Takumi, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki, Nagamatsu, Kentaro
Published in Scientific reports (27.02.2023)
Published in Scientific reports (27.02.2023)
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Journal Article