Search Results - "Tomioka, Taketoshi" :: K.UTB vyhledávací portál

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ELECTROSTATIC CHUCK

by TOMIOKA, Taketoshi
Year of Publication 19.09.2024

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METHOD FOR MEASURING SUBSTRATE TEMPERATURE, GRAPH CREATION METHOD, AND INFORMATION PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, SATO MASAKI
Year of Publication 22.06.2022

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ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH JISOO
Year of Publication 18.03.2022

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EDGE RING STAGE AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, CHIBA RYO, NAGAYAMA AKIRA, SASAKI YASUHARU, SATOH DAIKI
Year of Publication 18.10.2021

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EDGE RING, MOUNTING TABLE AND SUBSTRATE PROCESSING DEVICE

by TOMIOKA TAKETOSHI, CHIBA RYO, NAGAYAMA AKIRA, SASAKI YASUHARU, SATO DAIKI
Year of Publication 14.10.2021

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기판 지지체 및 기판 처리 장치

by TOMIOKA TAKETOSHI, NAGAYAMA AKIRA, SASAKI YASUHARU, YAMAGUCHI SHIN
Year of Publication 28.04.2021

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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH JISOO
Year of Publication 28.01.2021

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SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE

by TOMIOKA TAKETOSHI, NAGAYAMA AKIRA, SASAKI YASUHARU, YAMAGUCHI SHIN
Year of Publication 26.03.2020

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SUBSTRATE SUPPORT AND SUBSTRATE TREATMENT DEVICE

by TOMIOKA, Taketoshi, YAMAGUCHI, Shin, NAGAYAMA, Akira, SASAKI, Yasuharu
Year of Publication 19.03.2020

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ELECTROSTATIC ATTRACTION METHOD, PLASMA PROCESSING METHOD AND PLASMA PROCESSING DEVICE

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH JISOO
Year of Publication 23.01.2020

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ELECTROSTATIC ATTRACTION METHOD, PLASMA PROCESSING METHOD AND PLASMA PROCESSING DEVICE

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH JISOO
Year of Publication 18.10.2018

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Patent

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FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, SASAKI YASUHARU, UCHIDA YOHEI, ISHIBASHI JUNJI, TSUKAHARA TOSHIYA
Year of Publication 05.07.2018

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FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, SASAKI YASUHARU, UCHIDA YOHEI, ISHIBASHI JUNJI, TSUKAHARA TOSHIYA
Year of Publication 05.07.2018

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FOCUS RING AND SUBSTRATE PROCESSING DEVICE

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH JISOO
Year of Publication 09.03.2017

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Patent

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MOUNTING TABLE AND PLASMA PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, GOHIRA TAKU, MAKABE TOSHIYUKI
Year of Publication 05.09.2014

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ELECTROSTATIC SUCTION METHOD AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH JISOO
Year of Publication 07.07.2016

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FOCUS RING AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH, JI SOO
Year of Publication 14.03.2017

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ELECTROSTATIC CHUCKING METHOD AND SUBSTRATE PROCESSING APPARATUS

by TOMIOKA TAKETOSHI, KISHI HIROKI, SASAKI YASUHARU, SUH, JI SOO
Year of Publication 05.07.2016

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Substrate processing apparatus and substrate support

by Tomioka, Taketoshi, Sasaki, Yasuharu, Kishi, Hiroki, Suh, Jisoo
Year of Publication 06.12.2022

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Mounting table and plasma processing apparatus

by Makabe, Toshiyuki, Gohira, Taku, Tomioka, Taketoshi
Year of Publication 14.07.2020

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Patent

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